US2018350706A1PendingUtilityA1

System in package process flow

Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: Nov 7, 2011Filed: Aug 9, 2018Published: Dec 6, 2018
Est. expiryNov 7, 2031(~5.3 yrs left)· nominal 20-yr term from priority
H10W 74/00H10W 74/142H10W 72/0198H10W 90/288H10W 90/24H10W 72/073H10W 72/877H10W 72/856H10W 72/931H10W 72/07236H10W 72/01271H10W 72/072H10W 72/241H10W 72/354H10W 90/724H10W 72/252H10W 90/734H10W 90/732H10W 74/15H10W 90/00H05K 3/403H10W 74/117H10W 72/248H10W 70/685H10W 70/635H10W 90/701H10W 74/129H10W 74/012H10W 70/695H01L 2224/92125H01L 24/97H01L 2924/181H01L 2224/81191H01L 23/49822H01L 2924/00012H01L 2224/81447H01L 2224/81192H01L 2224/8191H01L 23/145H01L 25/50H01L 24/16H01L 2924/014H01L 2224/97H01L 2924/15747H01L 2224/73204H01L 24/32H01L 2924/1436H01L 2224/73253H01L 2225/06562H01L 2224/81815H01L 2225/06517H01L 23/3128H01L 2224/2919H01L 2224/32145H01L 2224/81H01L 2224/81193H01L 23/49816H01L 24/29H01L 24/73H01L 24/13H01L 21/563H01L 2924/14H01L 2924/15311H01L 2224/16237H01L 2224/16225H01L 2224/83385H01L 25/03H01L 24/83H01L 24/81H01L 24/92H01L 2224/73203H01L 2224/131H01L 2924/18161H01L 2224/32225H01L 2924/00H01L 2924/1437H01L 23/49827H01L 25/0652H01L 2225/06589
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Claims

Abstract

A method comprises connecting a substrate having a plurality of integrated circuit (IC) dies to a package substrate, so that the package substrate extends beyond at least two edges of the substrate, leaving first and second edge portions of the package substrate having exposed contacts. The first and second edge portions meet at a first corner of the package substrate. At least a first upper die package is placed over the substrate, so that first and second edge portions of the first upper die package extend beyond the at least two edges of the substrate. Pads on the first and second edge portions of the first upper die package are connected to the contacts of the first and second edge portions of the package substrate.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A method comprising:
 (a) connecting an integrated circuit (IC) die to a substrate,
 wherein the substrate comprises a first substrate edge portion, a second substrate edge portion, a third substrate edge portion, and a fourth substrate edge portion, 
 wherein the first substrate edge portion and the second substrate edge portion meet at a first corner of the substrate adjacent to a first corner of the IC die, and 
 wherein the third substrate edge portion and the fourth substrate edge portion meet at a second corner of the substrate adjacent to a second corner of the IC die; 
   (b) placing a first upper die package having a first upper die edge portion and a second upper die edge portion over the IC die, so as to cover and extend beyond the first corner of the IC die;   (c) connecting pads on the first upper die edge portion and the second upper die edge portion to contacts of the first substrate edge portion and the second substrate edge portion;   (d) placing a second upper die package having a third upper die edge portion and a fourth upper die edge portion over the IC die that is partially overlaid by the first upper die package, so as to cover and extend beyond the second corner of the IC die; and   (e) connecting pads on the third upper die edge portion and the fourth upper die edge portion to contacts of the third substrate edge portion and the fourth substrate edge portion.   
     
     
         2 . The method of  claim 1 , wherein the second upper die package is located diagonally from the first upper die package, and wherein the first upper die package and the second upper die package are spaced apart so that neither lies over the other. 
     
     
         3 . The method of  claim 1 , the method further comprising:
 depositing a solder paste on the contacts of the first substrate edge portion and the second substrate edge portion before step (c).   
     
     
         4 . The method of  claim 1 , further comprising:
 placing solder on the contacts of the first substrate edge portion and the second substrate edge portion; and   depositing a solder paste on the solder before step (c).   
     
     
         5 . The method of  claim 4 , wherein the solder is placed on the contacts of the first substrate edge portion and the second substrate edge portion after step (a). 
     
     
         6 . The method of  claim 1 , further comprising placing solder on the contacts of the first substrate edge portion and the second substrate edge portion before step (a). 
     
     
         7 . The method of  claim 5 , further comprising
 applying a molded underfill material around the solder and above the first upper die package.   
     
     
         8 . The method of  claim 7 , wherein an underfill material is deposited between the IC die and the substrate, between steps (a) and (b). 
     
     
         9 . The method of  claim 8 , further comprising depositing a first underfill material between the IC die and the substrate, before applying the molded underfill material around the solder. 
     
     
         10 . The method of  claim 1 , further comprising:
 placing a thermal interface material over the IC die before step (b).   
     
     
         11 . A method comprising:
 (a) connecting at an integrated circuit (IC) die to a substrate, so that a first substrate edge portion, a second substrate edge portion, a third substrate edge portion, and a fourth substrate edge portion of the substrate having contacts thereon extend beyond four edges of the IC die;   (b) placing a first upper die package over the IC die, with the IC die located between the first upper die package and the substrate,   (c) placing a second upper die package over the IC die, the first upper die package and the second upper die package positioned diagonally from each other in a plane and spaced apart so that neither the first upper die package and the second upper die package lies over the other;   (d) connecting pads on a first upper die edge portion and a second upper die edge portion of the first upper die package directly to the contacts of the first substrate edge portion and the second substrate edge portion; and   (e) connecting pads on a third upper die edge portion and a fourth upper die edge portion of the second upper die package to the contacts of the third substrate edge portion and the fourth substrate edge portion.   
     
     
         12 . The method of  claim 11 , wherein step (a) includes connecting the IC die to the substrate using solder, the method further comprising applying a first underfill material around the solder, between steps (a) and (b). 
     
     
         13 . The method of  claim 12 , wherein the step of applying the first underfill material includes depositing the first underfill material between the IC die and the substrate. 
     
     
         14 . The method of  claim 11 , further comprising placing a thermal interface material over the IC die before step (b). 
     
     
         15 . A method comprising:
 (a) flip chip mounting an integrated circuit (IC) die over a substrate, wherein the substrate comprises a first substrate edge portion, a second substrate edge portion, a third substrate edge portion, and a fourth substrate edge portion;   (b) placing a first upper die package over the IC die, so as to cover and extend beyond a first IC die corner of the IC die,   (c) connecting pads on a first upper die portion and a second upper die edge portion of the first upper die package to contacts of the first substrate edge portion and the second substrate edge portion;   (d) placing a second upper die package over the substrate that is partially overlaid by the first upper die package, so as to cover and extend beyond a second corner of the IC die; and   (e) connecting pads on a third upper die edge portion and a fourth upper die edge portion of the second upper die package to contacts on the third substrate edge portion and the fourth substrate edge portion.   
     
     
         16 . The method of  claim 15 , wherein the first upper die package and the second upper die package are positioned diagonally from each other and spaced apart so that neither lies over the other. 
     
     
         17 . The method of  claim 15 , wherein step (a) includes connecting the IC die to the substrate using solder, the method further comprising applying a first underfill material around the solder, between steps (a) and (b), wherein the step of applying the first underfill material includes depositing the first underfill material between the IC die and the substrate. 
     
     
         18 . The method of  claim 15 , wherein the first upper die package and the second upper die package includes two different dies from the group consisting of a general purpose processor, a graphics processor, an audio/video processor, a digital radio receiver, DRAM, SRAM, or flash memory, a communications processor, a global positioning satellite (GPS) receiver, and a power management unit. 
     
     
         19 . The method of  claim 15 , wherein the first upper die package and the second upper die package are wafer level chip scale packages. 
     
     
         20 . The method of  claim 15 , further comprising thinning back surfaces of the first upper die package and the second upper die package after step (e).

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