Manufacturing apparatus of semiconductor device, and manufacturing method of semiconductor device

Abstract

A manufacturing apparatus includes a first supporting section to support a first tape section. The first tape section has a first surface facing away from the first supporting section. For example, a semiconductor chip can be disposed on the first surface. A second supporting section of the apparatus supports a second tape section in a facing arrangement with the first tape section. The second tape section has a second surface facing away from the second supporting section. For example, a semiconductor chip can be transferred from the first surface to the second surface in a manufacturing process. A ring element is between the first and second tape sections and surrounds a space between the first and second tape sections. The ring element has a port allowing fluid communication between the space and an outlet port.

What is claimed is: 
     
         1 . A manufacturing apparatus, comprising:
 a first supporting section configured to support a first tape section, the first tape section having a first surface facing away from the first supporting section;   a second supporting section configured to support a second tape section in a facing arrangement with the first tape section supported on the first supporting section, the second tape section having a second surface facing away from the second supporting section; and   a ring element configured to be between the first and second supporting sections when the first and second tape sections are in the facing arrangement, the ring element disposed at a periphery of a space that is between the first and second tape sections when in the facing arrangement, and having a passage allowing fluid communication between the space and an outlet port, wherein the passage includes:
 a vertical passage that extends in the ring element along a vertical direction from the second supporting section toward the first supporting section, 
 a horizontal passage that is in fluid communication with the space, and 
 a connection section that extends in a circumferential direction of the ring element and connects the vertical passage and the horizontal passage. 
   
     
     
         2 . The apparatus according to  claim 1 , wherein the horizontal passage comprises a plurality horizontal passages arranged along an inner surface of the ring element and connected to the vertical passage through the connection section. 
     
     
         3 . The apparatus according to  claim 2 , wherein the plurality of horizontal passages are spaced at equal intervals along the inner surface of the ring element. 
     
     
         4 . The apparatus according to  claim 1 , wherein the horizontal passage and the connection section each have a concave shape provided on a surface of the ring element that contacts the first tape section when the first and second tape sections are in the facing arrangement. 
     
     
         5 . The apparatus according to  claim 4 , wherein the vertical passage extends through the second tape section when the first and second tape sections are in the facing arrangement. 
     
     
         6 . The manufacturing apparatus according to  claim 1 , further comprising:
 a first frame having a ring-like shape with an inner diameter that is greater than or equal to an outer diameter of the ring element; and   a second frame having a ring-like shape with an inner diameter that is greater than or equal to the outer diameter of the ring element,   the first and second frames being configured such that when the first and second tape sections are in the facing arrangement, the first and second frames are between the first and second supporting sections, the ring element is disposed within the inner diameters of first and second frames, an outer peripheral portion of the first tape section is between the first frame and the first supporting section, and an outer peripheral portion of the second tape section is between the second frame and the second supporting section frame.   
     
     
         7 . The apparatus according to  claim 6 , wherein the ring element has a thickness in the vertical direction greater than a sum of a thickness of the first frame and a thickness of the second frame in the vertical direction. 
     
     
         8 . The apparatus according to  claim 6 , wherein the first frame includes a notch in an outer circumferential portion of the ring-like shape. 
     
     
         9 . The apparatus according to  claim 6 , wherein the second frame includes a notch in an outer circumferential portion of the ring-like shape. 
     
     
         10 . The apparatus according to  claim 6 , wherein the first and second frames comprise stainless steel. 
     
     
         11 . The apparatus according to  claim 1 , wherein the ring element comprises:
 an inner ring element formed of a flexible resin material, and   an outer ring element formed of a material less flexible than the flexible resin material,   the inner ring element having a thickness in the vertical direction greater than a thickness of the outer ring element in the vertical direction,   the outer ring element having an inner diameter greater than an inner diameter of the inner ring element.   
     
     
         12 . The apparatus according to  claim 1 , wherein the second supporting section includes:
 a reinforcing plate that includes a through hole, and   a transparent plate within the through hole and between the reinforcing plate and the second tape section.   
     
     
         13 . The apparatus according to  claim 1 , wherein the first and second supporting sections comprise stainless steel. 
     
     
         14 . The apparatus according to  claim 1 , wherein the ring element comprises silicone. 
     
     
         15 . The apparatus according to  claim 1 , wherein, when the first and second tape sections are in the facing arrangement, the passage is in fluid communication with the outlet port via one of:
 a first through hole extending through the first supporting section and the first tape section, and   a second through hole extending though the second supporting section and the second tape section.