Laser unit and non-transitory computer-readable storage medium

Abstract

There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.

What is claimed is: 
     
         1 . A discharge-excited gas laser unit comprising
 a display configured to display resource consumption of the discharge-excited gas laser unit,   the resource consumption including at least one of laser gas consumption, purge gas consumption, cooling water consumption, and exhaust air consumption.   
     
     
         2 . The laser unit according to  claim 1 , wherein the laser gas consumption includes at least one of:
 consumption of mixed gas of argon and neon; and   consumption of mixed gas of fluorine, argon, and neon.   
     
     
         3 . The laser unit according to  claim 2 , further comprising
 a controller configured to calculate the laser gas consumption.   
     
     
         4 . The laser unit according to  claim 1 , wherein the laser gas consumption includes at least one of:
 consumption of mixed gas of krypton and neon; and   consumption of mixed gas of fluorine, krypton, and neon.   
     
     
         5 . The laser unit according to  claim 3 , further comprising
 a controller configured to calculate the laser gas consumption.   
     
     
         6 . The laser unit according to  claim 1 , wherein the purge gas consumption includes at least one of consumption of nitrogen gas and consumption of helium gas. 
     
     
         7 . The laser unit according to  claim 6 , further comprising
 a controller configured to calculate the purge gas consumption.   
     
     
         8 . The laser unit according to  claim 1 , further comprising:
 a charger;   a pulse power module; and   a chamber including a heat exchanger, wherein   the cooling water consumption includes consumption of water for cooling at least one of the charger, the pulse power module, and the heat exchanger.   
     
     
         9 . The laser unit according to  claim 8 , further comprising
 a controller configured to calculate the cooling water consumption.   
     
     
         10 . The laser unit according to  claim 1 , wherein the exhaust air consumption includes exhaust air consumption for ventilation. 
     
     
         11 . The laser unit according to  claim 10 , further comprising
 a controller configured to calculate the exhaust air consumption.   
     
     
         12 . The laser unit according to  claim 1 , wherein the display is provided in the discharge-excited gas laser unit. 
     
     
         13 . The laser unit according to  claim 1 , wherein the display is provided outside of the discharge-excited gas laser unit. 
     
     
         14 . A non-transitory computer-readable storage medium that stores a program configured to cause a computer to execute display resource consumption on a display of a discharge-excited gas laser unit, wherein
 the resource consumption includes at least one of laser gas consumption, purge gas consumption, cooling water consumption, and exhaust air consumption.