Meta-surface optical element and method of manufacturing the same

Abstract

Provided are meta-surface optical device and methods of manufacturing the same. The meta-surface optical device may include a meta-surface arranged on a region of a substrate and a light control member arranged around the meta-surface. The light control member may be arranged on or below the substrate. A material layer formed of the same material used to form the meta-surface may be disposed between the light control member and the substrate. Also, the meta-surface may be a first meta-surface arranged on an upper surface of the substrate, and a second meta-surface may be arranged on a bottom surface of the substrate. Also, the meta-surface may include a first meta-surface and at least one second meta-surface may formed on the first meta-surface, and the light control member may be arranged around the at least one second meta-surface.

What is claimed is: 
     
         1 . A meta-surface optical device comprising:
 a substrate;   a meta-surface disposed on the substrate; and   a light control member arranged around the meta-surface.   
     
     
         2 . The meta-surface optical device of  claim 1 , wherein the light control member is disposed on the substrate. 
     
     
         3 . The meta-surface optical device of  claim 1 , wherein the meta-surface is disposed on an upper surface of the substrate, and the light control member is disposed on a bottom surface of the substrate. 
     
     
         4 . The meta-surface optical device of  claim 2 , further comprising a material layer disposed between the light control member and the substrate, wherein a material of the material layer is the same as a material of the meta-surface. 
     
     
         5 . The meta-surface optical device of  claim 2 , further comprising a material layer completely covering a surface of the light control member. 
     
     
         6 . The meta-surface optical device of  claim 1 , wherein the meta-surface is a first meta-surface disposed on an upper surface of the substrate, and wherein the meta-surface optical device further comprises a second meta-surface disposed on a bottom surface of the substrate. 
     
     
         7 . The meta-surface optical device of  claim 1 , wherein:
 the meta-surface is a first meta-surface,   the meta-surface optical device further comprises at least one second meta-surface stacked on the first meta-surface, and   the light control member is arranged around the at least one second meta-surface.   
     
     
         8 . The meta-surface optical device of  claim 1 , wherein the light control member is one of a light absorption layer and a light reflection layer. 
     
     
         9 . The meta-surface optical device of  claim 1 , wherein the light control member comprises a plurality of patterns configured to perform a first operation with respect to light incident thereon, and the meta-surface is configured to perform a second operation, different from the first operation, with respect to light incident thereon. 
     
     
         10 . The meta-surface optical device of  claim 9 , wherein the plurality of patterns of the light control member is configured to reflect the light incident thereon and the meta-surface is configured to refract the light incident thereon. 
     
     
         11 . The meta-surface optical device of  claim 9 , wherein the plurality of patterns of the light control member is configured to absorb the light incident thereon and the meta-surface is configured to refract the light incident thereon. 
     
     
         12 . The meta-surface optical device of  claim 1 , wherein the light control member comprises a first plurality of patterns, configured to perform a first operation with respect to light incident thereon, and a second plurality of patterns, configured to perform a second operation, different from the first operation, with respect to light incident thereon, and wherein the meta-surface is configured to perform a third operation, different from the first operation and the second operation, with respect to light incident thereon. 
     
     
         13 . The meta-surface optical device of  claim 4 , wherein the material layer comprises a plurality of alignment key patterns. 
     
     
         14 . The meta-surface optical device of  claim 6 , further comprising a second light control member arranged around the second meta-surface. 
     
     
         15 . The meta-surface optical device of  claim 6 , wherein the second meta-surface comprises a plurality of patterns configured to perform a first operation with respect to light incident thereon and wherein the first meta-surface comprises a plurality of patterns configured to perform a second operation, different from the first operation, with respect to light incident thereon. 
     
     
         16 . The meta-surface optical device of  claim 1 , further comprising a gap between the meta-surface and the light control member, wherein a width of the gap is less than or equal to 5 μm. 
     
     
         17 . The meta-surface optical device of  claim 1 , wherein the meta-surface and the light control member overlap with each other, and a width of overlap between the meta-surface and the light control member is less than or equal to 9 μm. 
     
     
         18 . A method of manufacturing a meta-surface optical device, the method comprising:
 forming a meta-surface on a substrate; and   forming a light control member around the meta-surface.   
     
     
         19 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on an upper surface of the substrate and the forming the light control member comprises forming the light control member separated from the upper surface of the substrate. 
     
     
         20 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on an upper surface of the substrate and the forming the light control member comprises forming the light control member contacting the upper surface of the substrate. 
     
     
         21 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on an upper surface of the substrate and the forming the light control member comprises forming the light control member on a bottom surface of the substrate. 
     
     
         22 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on an upper surface of the substrate and the forming the light control member comprises forming a first light control member above the substrate and forming a second light control member below the substrate. 
     
     
         23 . The method of  claim 18 , wherein the forming the meta-surface on the substrate comprises sequentially forming a first meta-surface and forming a second meta-surface. 
     
     
         24 . The method of  claim 18 , wherein the forming the meta-surface comprises forming a first meta-surface above the substrate and forming a second meta-surface below the substrate. 
     
     
         25 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on a first surface of the substrate and the forming the light control member comprises forming the light control member on the first surface of the substrate. 
     
     
         26 . The method of  claim 18 , wherein the forming the meta-surface comprises forming the meta-surface on a first surface of the substrate and the forming the light control member comprises forming the light control member on a second surface of the substrate, different from the first surface. 
     
     
         27 . The method of  claim 26 , wherein the forming the light control member further comprises forming a first portion of the light control member, wherein the first portion is configured to perform a first operation with respect to light incident thereon and forming a second portion of the light control member, wherein the second portion is configured to perform a second operation, different form the first operation, with respect to light incident thereon. 
     
     
         28 . The method of  claim 18 , wherein the light control member comprises one of a light absorption layer and a light reflection layer. 
     
     
         29 . The method of  claim 18 , wherein the light control member comprises a plurality of patterns that absorb, reflect, or refract light incident thereon. 
     
     
         30 . The method of  claim 18 , wherein the forming the light control member comprises forming the light control member such that the light control member is separated from the meta-surface by a separation distance that is less than or equal to 5 μm. 
     
     
         31 . The method of  claim 18 , wherein the forming the light control member comprises forming the light control member to overlap with the meta-surface, wherein a width of overlap between the light control member and the meta-surface is less than or equal to 9 μm.