Compact instrument with exchangeable modules for multiple microfabrication and/or nanofabrication methods

Abstract

A device used as an instrument for microfabrication and/or nanofabrication featuring exchangeable module heads and multi-axis positioning of components. For example, a single module head can be adapted for carrying out photolithography, microcontact printing, and/or nanoimprint lithography. Another module head can be adapted to carry out different methods. The versatile device is used for training and is compact and relatively inexpensive. A working example for microcontact printing is provided.

What is claimed is: 
     
         1 . A microfabrication and/or nanofabrication device comprising a hardware platform with at least one multi-axis positioning stage including electronic control of the stage, wherein the hardware platform is also adapted to receive an exchangeable module head adapted to carry out at least one microfabrication and/or nanofabrication method. 
     
     
         2 . The device of  claim 1 , wherein the device further comprises a cover for the hardware platform for UV protection and safety from mechanical components. 
     
     
         3 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least one of photolithography, UV nanoimprint lithography, microcontact printing, hot embossing, hot nanoimprint lithography, micro-arraying, two-dimensional UV lithography, three-dimensional printing, stereo lithography, and/or scanning probe lithography. 
     
     
         4 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least one of photolithography, UV nanoimprint lithography, and/or microcontact printing. 
     
     
         5 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least one of hot embossing and/or hot nanoimprint lithography. 
     
     
         6 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least one of 3D printing and stereolithography. 
     
     
         7 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least two of photolithography, UV nanoimprint lithography, microcontact printing, hot embossing, hot nanoimprint lithography, micro-arraying, two-dimensional UV lithography, three-dimensional printing, stereo lithography, and/or scanning probe lithography. 
     
     
         8 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least three of photolithography, UV nanoimprint lithography, microcontact printing, hot embossing, hot nanoimprint lithography, micro-arraying, two-dimensional UV lithography, three-dimensional printing, stereo lithography, and/or scanning probe lithography. 
     
     
         9 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises at least scanning probe lithography, wherein the scanning probe lithography comprises at least one of dip pen nanolithography, nanografting, nanoshaving, and/or nanoindentation. 
     
     
         10 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises photolithography, and the module comprises at least one UV source and at least one mask assembly. 
     
     
         11 . The device of  claim 1 , wherein the microfabrication and/or nanofabrication method comprises tip bias or AFM bias lithography. 
     
     
         12 . The device of  claim 1 , wherein the at least one multi-axis positioning stage comprises at least three axes for positioning. 
     
     
         13 . The device of  claim 1 , wherein the at least one multi-axis positioning stage includes a z-axis stage and an x-y stage. 
     
     
         14 . The device of  claim 1 , wherein the at least one multi-axis positioning stage is adapted to allow for rotation and/or tilt. 
     
     
         15 . The device of  claim 1 , wherein the device further comprises a viewing assembly. 
     
     
         16 . The device of  claim 1 , wherein the device further comprises a load cell. 
     
     
         17 . The device of  claim 1 , wherein the device further comprises at least one LED or a camera. 
     
     
         18 . An exchangeable module head which, when used in conjunction with a microfabrication and/or nanofabrication device according to  claim 1 , is capable of performing at least one microfabrication and/or nanofabrication technique. 
     
     
         19 . A method of microfabrication and/or nanofabrication, comprising engaging the device of  claim 1  with the exchangeable module head and carrying out the microfabrication and/or nanofabrication. 
     
     
         20 . An exchangeable module head adapted to perform at least one nanofabrication and/or microfabrication method.