US2020010977A1PendingUtilityA1

Calcium fluoride member, method for producing same, and method for pressure-bonding calcium fluoride crystal

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Assignee: NIKON CORPPriority: Dec 25, 2013Filed: Sep 18, 2019Published: Jan 9, 2020
Est. expiryDec 25, 2033(~7.4 yrs left)· nominal 20-yr term from priority
H01J 61/025C30B 29/12H01J 61/30H01J 61/302C30B 33/06H01J 9/247
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Claims

Abstract

The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A calcium fluoride member, comprising:
 a first member made from monocrystalline calcium fluoride; and   a second member made from monocrystalline or polycrystalline calcium fluoride,   the first member and the second member being pressure-bonded together to form the calcium fluoride member.   
     
     
         2 . The calcium fluoride member according to  claim 1 , wherein the second member is made from monocrystalline calcium fluoride. 
     
     
         3 . The calcium fluoride member according to  claim 1 , wherein the calcium fluoride member is used as a member for constituting a light source. 
     
     
         4 . The calcium fluoride member according to  claim 3 , wherein the member for constituting the light source is a gas sealing container that includes a spherical shell in which a gas is sealed therein. 
     
     
         5 . The calcium fluoride member according to  claim 3 , wherein the member for constituting the light source is a gas sealing container in which a gas is sealed therein, the gas sealing container including a first cylinder in which the gas is sealed therein and a flange that is pressure-bonded to an end of the first cylinder in an axial direction of the first cylinder, the first cylinder being included as the first member and the flange being included as the second member. 
     
     
         6 . The calcium fluoride member according to  claim 1 , wherein the calcium fluoride member is a cylinder-shaped member, and a flow path for circulating a coolant is formed inside a peripheral wall portion of the cylinder-shaped member. 
     
     
         7 . The calcium fluoride member according to  claim 6 ,
 wherein the cylinder-shaped member is a gas sealing container in which a gas is sealed therein,   the gas sealing container includes a first cylinder as the first member and a second cylinder as the second member, the second cylinder being pressure-bonded to an end of the first cylinder in an axial direction of the first cylinder,   the first cylinder includes a transparent portion that transmits light from the sealed gas,   the flow path is formed in the second cylinder, and   the coolant cools the transparent portion.

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