Method and apparatus for substrate transfer and radical confinement

Abstract

Embodiments of the present invention provide an apparatus for transferring substrates and confining a processing environment in a chamber. One embodiment of the present invention provides a hoop assembly for using a processing chamber. The hoop assembly includes a confinement ring defining a confinement region therein, and three or more lifting fingers attached to the hoop. The three or more lifting fingers are configured to support a substrate outside the inner volume of the confinement ring.

What is claimed is: 
     
         1 . A hoop assembly for use in a processing chamber, comprising:
 a confinement ring defining a confinement region therein;   a hoop body mating with the confinement ring, the hoop body slanted to reduce a thickness across a diameter of the hoop body; and   three or more lifting fingers attached to the hoop body and extending downwards, wherein each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region.   
     
     
         2 . The hoop assembly of  claim 1  further comprising:
 a hoop body having a lip supporting the confinement ring. 
 
     
     
         3 . The hoop assembly of  claim 2 , wherein each of the three or more lifting finger is attached to a lower surface of the hoop body. 
     
     
         4 . The hoop assembly of  claim 2 , wherein each lifting finger comprises:
 a vertical portion attached to the lower surface of the hoop body; and   a horizontal portion connected to the vertical portion and extending radially inward, wherein the contact tip is positioned on the horizontal portion.   
     
     
         5 . The hoop assembly of  claim 2 , wherein the hoop body comprises:
 a frame portion defining a central opening; and   a handle portion connected to the frame portion at one side outside the central opening.   
     
     
         6 . The hoop assembly of  claim 5 , further comprising:
 a shaft attached to the handle portion of the hoop body.   
     
     
         7 . The hoop assembly of  claim 2 , wherein the confinement ring has a ridge mating with a notch formed in the hoop body. 
     
     
         8 . The hoop assembly of  claim 2 , wherein the confinement ring is formed from quartz, and the hoop body formed from aluminum. 
     
     
         9 . The hoop assembly of  claim 1 , wherein the confinement ring is a sleeve ring with a vertically extended side wall, and one or more through holes are formed between an inner surface and an outer surface of the vertically extended side wall. 
     
     
         10 . A chamber for processing a substrate, comprising:
 a chamber body defining a chamber volume therein, the chamber body having a sealable substrate transfer opening;   a substrate support pedestal assembly disposed in the chamber volume;   a hoop assembly moveable within the chamber volume, wherein the hoop assembly comprises:
 a confinement ring defining a confinement region therein; 
 a hoop body mating with the confinement ring, the hoop body slanted to reduce a thickness across a diameter of the hoop body; and 
 three or more lifting fingers attached to the hoop body and extending downwards, wherein each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region, wherein the confinement ring of the hoop assembly is movable between an elevated position and a lowered position, and the confined region is above the substrate support pedestal assembly when the hoop assembly is in the lowered position. 
   
     
     
         11 . The chamber of  claim 10 , wherein the elevated position of the confinement ring is above the sealable substrate transfer opening and the lowered position of the confinement ring is in front of the sealable substrate transfer opening. 
     
     
         12 . The chamber of  claim 10 , further comprising:
 a showerhead disposed above the substrate support pedestal assembly, wherein the height of the confinement ring spans from a lower surface of the showerhead and an upper surface of the substrate support pedestal assembly.   
     
     
         13 . The chamber of  claim 10 , further comprising:
 a lid having a cavity receiving the confinement ring when the confinement ring is in the elevated position.   
     
     
         14 . The chamber of  claim 10 , wherein the confinement ring is a sleeve ring with a vertically extended side wall, and one or more through holes are formed between an inner surface and an outer surface of the vertically extended side wall. 
     
     
         15 . The chamber of  claim 10 , wherein the confinement ring has a height that at least spans from the substrate support pedestal assembly to an elevation above the sealable substrate transfer opening. 
     
     
         16 . The chamber of  claim 10 , wherein the confinement ring is formed from quartz. 
     
     
         17 . The chamber of  claim 10 , wherein the hoop body further comprises:
 a lip supporting the confinement ring, wherein each of the three or more lifting finger is attached to a lower surface of the hoop body.   
     
     
         18 . The chamber of  claim 10 , wherein the hoop body further comprises:
 a lip supporting the confinement ring, and each lifting finger comprises:
 a vertical portion attached to the lower surface of the hoop body; and 
   a horizontal portion connected to the vertical portion and extending radially inward, wherein the contact tip is positioned on the horizontal portion.   
     
     
         19 . A method for processing a substrate, comprising:
 transferring a substrate through an opening of a processing chamber to three or more lifting fingers of a hoop assembly disposed in the processing chamber, wherein the hoop assembly comprises:
 a confinement ring defining a confinement region therein; 
 a hoop body mating with the confinement ring, the hoop body slanted to reduce a thickness across a diameter of the hoop body; and 
 three or more lifting fingers attached to the hoop body and extending downwards, wherein each of the three or more lifting fingers has a contact tip positioned radially inward from the hoop body to form a substrate support surface below and spaced apart from the confinement region; 
   lowering the hoop assembly to transfer the substrate from the lifting fingers to a substrate support pedestal assembly disposed in the processing chamber;   positioning the hoop assembly in a processing position wherein the confinement region is at least immediately above the substrate disposed on the substrate support pedestal assembly with the confinement ring shielding the opening; and   processing the substrate by supplying a processing gas to the confinement region with the hoop assembly in the processing position.   
     
     
         20 . The method of  claim 19 , wherein a height of the confinement ring spans from the substrate to a lower surface of a showerhead positioned above the substrate support pedestal assembly when the hoop assembly is in the processing position.