US2022037358A1PendingUtilityA1

Conductive Structures, Assemblies Having Vertically-Stacked Memory Cells Over Conductive Structures, and Methods of Forming Conductive Structures

Assignee: MICRON TECHNOLOGY INCPriority: Dec 22, 2017Filed: Oct 15, 2021Published: Feb 3, 2022
Est. expiryDec 22, 2037(~11.4 yrs left)· nominal 20-yr term from priority
H10P 14/3411H10W 20/084H10W 20/056H10W 20/033H10W 20/20H10W 20/4451H10W 20/425H10B 41/27H10D 30/693H10D 30/689H10D 30/683H10D 62/292G11C 16/0483G11C 16/08H01L 27/11556H01L 27/11565H01L 27/1157H01L 21/76807H01L 21/76843H01L 21/76877H01L 27/11582H01L 23/535H01L 29/1037H01L 21/02532H01L 29/7926H01L 27/11578H10B 43/27H10B 43/35H10B 41/41H10B 43/10H10B 43/40H10B 43/20
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Claims

Abstract

Some embodiments include a conductive structure of an integrated circuit. The conductive structure includes an upper primary portion, with the upper primary portion having a first conductive constituent configured as a container. The container has a bottom, and a pair of sidewalls extending upwardly from the bottom. An interior region of the container is over the bottom and between the sidewalls. The upper primary portion includes a second conductive constituent configured as a mass filling the interior region of the container. The second conductive constituent is a different composition than the first conductive constituent. One or more conductive projections join to the upper primary portion and extend downwardly from the upper primary portion. Some embodiments include assemblies comprising memory cells over conductive structures. Some embodiments include methods of forming conductive structures.

Claims

exact text as granted — not AI-modified
1 - 28 . (canceled) 
     
     
         29 . A conductive structure of an integrated circuit, comprising:
 a conductive container having a bottom and having a pair of sidewalk extending upwardly from the bottom;   a conductive projection extending downwardly from the bottom of the conductive container;   an interior region defined by the bottom and sidewalk of the conductive container; and   a conductive mass filling the interior region, the conductive mass comprising a different composition than the conductive container.   
     
     
         30 . The conductive structure of  claim 29  wherein the conductive mass comprises at least one conductive material. 
     
     
         31 . The conductive structure of  claim 29  wherein the conductive mass comprises only one conductive material. 
     
     
         32 . The conductive structure of  claim 29  wherein the conductive mass comprises at least two conductive materials. 
     
     
         33 . The conductive structure of  claim 29  wherein the conductive mass comprises at least three conductive materials. 
     
     
         34 . The conductive structure of  claim 29  wherein the conductive mass comprises only three conductive materials. 
     
     
         35 . The conductive structure of  claim 29  wherein the interior region is only defined by the bottom and sidewalls of the conductive container. 
     
     
         36 . The conductive structure of  claim 29  wherein the interior region defined by the bottom and sidewalls of the conductive container comprises a first portion of the interior region, and further comprising a second portion of the interior region defined by the conductive projection. 
     
     
         37 . The conductive structure of  claim 36  wherein the conductive mass fills the second portion of the interior region. 
     
     
         38 . The conductive structure of  claim 37  wherein the conductive mass comprises at least one conductive material filling the second portion of the interior region. 
     
     
         39 . The conductive structure of  claim 37  wherein the conductive mass comprises only one conductive material filling the second portion of the interior region. 
     
     
         40 . The conductive structure of  claim 37  wherein the conductive mass comprises at least two conductive materials filling the second portion of the interior region. 
     
     
         41 . The conductive structure of  claim 37  wherein the conductive mass comprises only two conductive materials filling the second portion of the interior region. 
     
     
         42 . The conductive structure of  claim 29  wherein the conductive projection comprises two conductive projections extending downwardly from the bottom of the conductive container. 
     
     
         43 . The conductive structure of  claim 42  wherein the two conductive projection define arcuate corners with the conductive container. 
     
     
         44 . The conductive structure of  claim 29  wherein the conductive projection defines sharp corners with the conductive container. 
     
     
         45 . The conductive structure of  claim 29  wherein the conductive projection defines arcuate corners with the conductive container. 
     
     
         46 . The conductive structure of  claim 29  further comprising a planarized upper surface extending across the conductive container and the conductive mass. 
     
     
         47 . The conductive structure of  claim 29  wherein the conductive container comprises a metal and the conductive mass comprises a semiconductor material.

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