Showerhead shroud

Abstract

A processing chamber includes an upper surface and a showerhead arranged to supply gases through the upper surface into the processing chamber. At least a portion of the showerhead extends above the upper surface of the processing chamber. A shroud enclosure is arranged on the upper surface of the processing chamber. The shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber and is configured to isolate radio frequency interference generated by the showerhead.

What is claimed is: 
     
         1 . A processing chamber, comprising:
 an upper surface;   a showerhead arranged to supply gases through the upper surface into the processing chamber, wherein at least a portion of the showerhead extends above the upper surface of the processing chamber; and   a shroud enclosure arranged on the upper surface of the processing chamber, wherein the shroud enclosure is arranged around the portion of the showerhead extending above the upper surface of the processing chamber, and wherein the shroud enclosure is configured to isolate radio frequency interference generated by the showerhead.   
     
     
         2 . The processing chamber of  claim 1 , wherein the shroud enclosure includes a plurality of sections each corresponding to portions of one or more sides of the shroud enclosure. 
     
     
         3 . The processing chamber of  claim 2 , wherein the plurality of sections includes a bottom section including an opening arranged to receive the portion of the showerhead extending above the upper surface of the processing chamber and lower flange portions extending upward from outer edges of the bottom section. 
     
     
         4 . The processing chamber of  claim 3 , wherein the plurality of sections includes one or more side sections arranged on the bottom section within a perimeter defined by the lower flange portions. 
     
     
         5 . The processing chamber of  claim 4 , wherein the plurality of sections includes a first top section and a second top section arranged on upper edges of the side sections. 
     
     
         6 . The processing chamber of  claim 5 , wherein the first top section and the second top section include upper flange sections extending downward from outer edges of the first top section and the second top section, wherein the upper flange sections overlap the upper edges of the side sections. 
     
     
         7 . The processing chamber of  claim 5 , wherein the shroud enclosure includes a plurality of tensioning rods arranged in respective corners of the shroud enclosure within the perimeter defined by the lower flange portions. 
     
     
         8 . The processing chamber of  claim 7 , wherein the plurality of tensioning rods is arranged on posts extending upward from the bottom section. 
     
     
         9 . The processing chamber of  claim 7 , further comprising a plurality of knobs arranged in upper ends of the tensioning rods, wherein the knobs are configured to bias the first top section and the second top section downward. 
     
     
         10 . The processing chamber of  claim 1 , further comprising a radio frequency filter module arranged adjacent to the shroud enclosure. 
     
     
         11 . The processing chamber of  claim 10 , wherein the radio frequency filter module and the shroud enclosure are arranged on the upper surface within an outer perimeter of the processing chamber. 
     
     
         12 . A substrate processing system, wherein the substrate processing system comprises a plurality of the processing chambers of  claim 1 , and wherein each of the processing chambers includes a respective one of the shroud enclosures. 
     
     
         13 . A shroud enclosure, comprising:
 a bottom section including an opening arranged to receive a portion of a showerhead extending above an upper surface of a processing chamber and lower flange portions extending upward from outer edges of the bottom section;   one or more side sections arranged on the bottom section within a perimeter defined by the lower flange portions; and   a first top section and a second top section arranged on upper edges of the side sections,   wherein the bottom section, the side sections, the first top section, and the second top section are separable from each other and, when assembled, are configured to isolate radio frequency interference generated by the showerhead.   
     
     
         14 . The shroud enclosure of  claim 13 , wherein the first top section and the second top section include upper flange sections extending downward from outer edges of the first top section and the second top section, wherein the upper flange sections overlap the upper edges of the side sections. 
     
     
         15 . The shroud enclosure of  claim 13 , wherein the shroud enclosure includes a plurality of tensioning rods arranged in respective corners of the shroud enclosure within the perimeter defined by the lower flange portions. 
     
     
         16 . The shroud enclosure of  claim 15 , wherein the plurality of tensioning rods is arranged on posts extending upward from the bottom section. 
     
     
         17 . The shroud enclosure of  claim 15 , further comprising a plurality of knobs arranged in upper ends of the tensioning rods, wherein the knobs are configured to bias the first top section and the second top section downward. 
     
     
         18 . An assembly comprising the shroud enclosure of  claim 13  and further comprising a radio frequency filter module arranged adjacent to the shroud enclosure. 
     
     
         19 . The assembly of  claim 18 , wherein the radio frequency filter module and the shroud enclosure are configured to be arranged on the upper surface within an outer perimeter of the processing chamber. 
     
     
         20 . A substrate processing system, wherein the substrate processing system comprises a plurality of processing chambers, and wherein each of the plurality of processing chambers includes a respective one of the shroud enclosures of  claim 13 .