Inventor · disambiguated record
Andrew Borth
Also filed as: BORTH ANDREW · BORTH ANDREW JAMES
5 granted patents·6 pending applications·0 citations·filing 2018–2023
59Inventor score
Files withLAM RES CORP11
Top patents by PatentIndex Score
11 records- 0165US11488810B2Showerhead shroudLAM RES CORP·Filed 2021·Granted Nov 1, 2022·0 cites·21 claims
- 0264US12509772B2Split showerhead cooling plateLAM RES CORP·Filed 2021·Granted Dec 30, 2025·0 cites·20 claims
- 0357US2022093372A1Showerhead shroudLAM RES CORP·Filed 2020·Application pending·0 cites
- 0453US2025046644A1Wafer transfer paddles with minimum contact area structures for reduced backside markingLAM RES CORP·Filed 2022·Application pending·0 cites
- 0549US2025116348A1Throttle valve for substrate processing systemsLAM RES CORP·Filed 2023·Application pending·0 cites
- 0649US2025251140A1Heat guardLAM RES CORP·Filed 2023·Application pending·0 cites
- 0746US2025121320A1Compact gas separator devices co-located on substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 0845US12334375B2Spindle assembly for wafer transfer in a multi-station process moduleLAM RES CORP·Filed 2020·Granted Jun 17, 2025·0 cites·14 claims
- 0945US12209310B2Concentration control using a bubblerLAM RES CORP·Filed 2021·Granted Jan 28, 2025·0 cites·26 claims
- 1036US2019376184A1Chemical vapor deposition shower head for uniform gas distributionLAM RES CORP·Filed 2018·Application pending·0 cites
- 1126USD1012041SClamshell cable guideLAM RES CORP·Filed 2021·Granted Jan 23, 2024·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →