Strontium tetraborate as optical glass material

Abstract

Strontium tetraborate can be used as an optical material. Strontium tetraborate exhibits high refractive indices, high optical damage threshold, and high microhardness. The transmission window of strontium tetraborate covers a very broad range of wavelengths, from 130 nm to 3200 nm, making the material particularly useful at VUV wavelengths. An optical component made of strontium tetraborate can be incorporated in an optical system, such as a semiconductor inspection system, a metrology system, or a lithography system. These optical components may include mirrors, lenses, lens arrays, prisms, beam splitters, windows, lamp cells or Brewster-angle optics.

What is claimed is: 
     
         1 . A linear optical component comprising strontium tetraborate. 
     
     
         2 . The linear optical component of  claim 1 , wherein the strontium tetraborate comprises strontium tetraborate in a glass phase. 
     
     
         3 . The linear optical component of  claim 1 , wherein the linear optical component comprises at least one of a mirror, a lens, a lens array, a prism, a beam splitter, a window, or a lamp cell. 
     
     
         4 . The linear optical component of  claim 2 , wherein the linear optical component is configured to transmit light having a wavelength within a range from 130 nm to 400 nm. 
     
     
         5 . A broadband ultraviolet lamp comprising:
 one or more linear optical components, wherein at least a portion of the one or more linear optical components are formed from strontium tetraborate.   
     
     
         6 . The broadband ultraviolet lamp of  claim 5 , wherein the strontium tetraborate comprises strontium tetraborate in a glass phase. 
     
     
         7 . The broadband ultraviolet lamp of  claim 5 , wherein the one or more linear optical components comprise at least one of a mirror, a lens, a lens array, a prism, a beam splitter, a window, or a lamp cell. 
     
     
         8 . The broadband ultraviolet lamp of  claim 5 , wherein the broadband ultraviolet lamp is configured to emit light, the light having a wavelength within a range from 130 nm to 400 nm. 
     
     
         9 . An optical system comprising:
 one or more linear optical components, wherein at least a portion of the one or more linear optical components are formed from strontium tetraborate.   
     
     
         10 . The optical system of  claim 9 , wherein the strontium tetraborate comprises strontium tetraborate in a glass phase. 
     
     
         11 . The optical system of  claim 9 , wherein the one or more linear optical components comprise at least one of a mirror, a lens, a lens array, a prism, a beam splitter, a window, or a lamp cell. 
     
     
         12 . The optical system of  claim 9 , wherein the one or more linear optical components are configured to transmit light having a wavelength within a range from 130 nm to 400 nm.