Inventor · disambiguated record
John Fielden
Also filed as: FIELDEN JOHN · FIELDEN JOHN S
148 granted patents·22 pending applications·4,700 citations·filing 1980–2024
99Inventor score
Top patents by PatentIndex Score
170 records- 0199US8929406B2193NM laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Jan 6, 2015·63 cites·26 claims
- 0299US6633831B2Methods and systems for determining a critical dimension and a thin film characteristic of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Oct 14, 2003·362 cites·82 claims
- 0399US6433541B1In-situ metalization monitoring using eddy current measurements during the process for removing the filmKLA TENCOR CORP·Filed 2000·Granted Aug 13, 2002·161 cites·21 claims
- 0498US10921261B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2020·Granted Feb 16, 2021·11 cites·17 claims
- 0598US10748730B2Photocathode including field emitter array on a silicon substrate with boron layerKLA TENCOR CORP·Filed 2016·Granted Aug 18, 2020·16 cites·27 claims
- 0698US7929667B1High brightness X-ray metrologyKLA TENCOR CORP·Filed 2009·Granted Apr 19, 2011·191 cites·18 claims
- 0798US6891627B1Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·192 cites·100 claims
- 0898US6707540B1In-situ metalization monitoring using eddy current and optical measurementsKLA TENCOR CORP·Filed 2000·Granted Mar 16, 2004·162 cites·38 claims
- 0998US6694284B1Methods and systems for determining at least four properties of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 17, 2004·211 cites·61 claims
- 1097US11237455B2Frequency conversion using stacked strontium tetraborate platesKLA CORP·Filed 2021·Granted Feb 1, 2022·6 cites·23 claims
- 1197US9818887B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2016·Granted Nov 14, 2017·11 cites·15 claims
- 1297US9529182B2193nm laser and inspection systemKLA TENCOR CORP·Filed 2014·Granted Dec 27, 2016·33 cites·3 claims
- 1397US9496425B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2013·Granted Nov 15, 2016·29 cites·26 claims
- 1497US9478402B2Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensorKLA TENCOR CORP·Filed 2014·Granted Oct 25, 2016·20 cites·10 claims
- 1597US8873596B2Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystalDRIBINSKI VLADIMIR·Filed 2012·Granted Oct 28, 2014·56 cites·15 claims
- 1697US8675188B2Method and system for determining one or more optical characteristics of structure of a semiconductor waferKLA TENCOR CORP·Filed 2013·Granted Mar 18, 2014·33 cites·29 claims
- 1797US8179530B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2010·Granted May 15, 2012·143 cites·24 claims
- 1897US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 1997US6812045B1Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantationKLA TENCOR INC·Filed 2001·Granted Nov 2, 2004·97 cites·52 claims
- 2097US6673637B2Methods and systems for determining a presence of macro defects and overlay of a specimenKLA TENCOR TECHNOLOGIES·Filed 2001·Granted Jan 6, 2004·120 cites·83 claims
- 2196US11360032B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2021·Granted Jun 14, 2022·4 cites·7 claims
- 2296US11114491B2Back-illuminated sensor and a method of manufacturing a sensorKLA CORP·Filed 2019·Granted Sep 7, 2021·8 cites·16 claims
- 2396US10121914B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2017·Granted Nov 6, 2018·9 cites·14 claims
- 2496US9748729B2183NM laser and inspection systemKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·14 cites·13 claims
- 2596US9608399B2193 nm laser and an inspection system using a 193 nm laserKLA TENCOR CORP·Filed 2014·Granted Mar 28, 2017·21 cites·18 claims
- 2696US9601299B2Photocathode including silicon substrate with boron layerKLA TENCOR CORP·Filed 2013·Granted Mar 21, 2017·18 cites·12 claims
- 2796US9116442B2Feedforward/feedback litho process control of stress and overlayADEL MICHAEL·Filed 2011·Granted Aug 25, 2015·18 cites·38 claims
- 2896US7751046B2Methods and systems for determining a critical dimension and overlay of a specimenKLA TENCOR TECH CORP·Filed 2003·Granted Jul 6, 2010·79 cites·13 claims
- 2996US7298481B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 20, 2007·46 cites·11 claims
- 3096US7280212B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 9, 2007·45 cites·12 claims
- 3196US7139083B2Methods and systems for determining a composition and a thickness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Nov 21, 2006·68 cites·62 claims
- 3296US6917433B2Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch processKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·61 cites·56 claims
- 3396US6806951B2Methods and systems for determining at least one characteristic of defects on at least two sides of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Oct 19, 2004·65 cites·74 claims
- 3496US6621264B1In-situ metalization monitoring using eddy current measurements during the process for removing the filmKLA TENCOR CORP·Filed 2002·Granted Sep 16, 2003·72 cites·15 claims
- 3595US11567391B1Frequency conversion using interdigitated nonlinear crystal gratingsKLA CORP·Filed 2021·Granted Jan 31, 2023·5 cites·21 claims
- 3695US10446696B2Back-illuminated sensor with boron layerKLA TENCOR CORP·Filed 2018·Granted Oct 15, 2019·5 cites·18 claims
- 3795US10175555B2183 nm CW laser and inspection systemKLA TENCOR CORP·Filed 2017·Granted Jan 8, 2019·12 cites·35 claims
- 3895US10044166B2CW DUV laser with improved stabilityKLA TENCOR CORP·Filed 2016·Granted Aug 7, 2018·10 cites·19 claims
- 3995US9865447B2High brightness laser-sustained plasma broadband sourceKLA TENCOR CORP·Filed 2016·Granted Jan 9, 2018·19 cites·38 claims
- 4095US9767986B2Scanning electron microscope and methods of inspecting and reviewing samplesKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·13 cites·21 claims
- 4195US9748294B2Anti-reflection layer for back-illuminated sensorKLA TENCOR CORP·Filed 2015·Granted Aug 29, 2017·15 cites·10 claims
- 4295US8502979B2Methods and systems for determining a critical dimension and overlay of a specimenLEVY ADY·Filed 2012·Granted Aug 6, 2013·24 cites·8 claims
- 4395US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 4495US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 4595US7196782B2Methods and systems for determining a thin film characteristic and an electrical property of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Mar 27, 2007·56 cites·71 claims
- 4695US7006235B2Methods and systems for determining overlay and flatness of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Feb 28, 2006·48 cites·71 claims
- 4795US6950196B2Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimenKLA TENCOR TECH CORP·Filed 2001·Granted Sep 27, 2005·50 cites·73 claims
- 4895US6919957B2Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 19, 2005·110 cites·90 claims
- 4995US6917419B2Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimenKLA TENCOR TECH CORP·Filed 2001·Granted Jul 12, 2005·51 cites·88 claims
- 5095US6891610B2Methods and systems for determining an implant characteristic and a presence of defects on a specimenKLA TENCOR TECH CORP·Filed 2001·Granted May 10, 2005·48 cites·87 claims
Showing the top 50 of 170 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →