US2022172962A1PendingUtilityA1

Embedded semiconductive chips in reconstituted wafers, and systems containing same

Assignee: INTEL CORPPriority: Apr 2, 2010Filed: Feb 21, 2022Published: Jun 2, 2022
Est. expiryApr 2, 2030(~3.7 yrs left)· nominal 20-yr term from priority
H10P 72/74H10W 74/111H10W 70/614H10W 44/00H10W 20/40H10W 74/00H10W 70/655H10W 72/0198H10W 90/754H10W 72/9413H10W 90/00H10W 70/09H10W 90/724H10W 74/019H10P 72/7424H01L 23/64H01L 25/0655H01L 21/31053H01L 2224/04105H01L 2924/19041H01L 21/78H01L 21/4853H01L 2224/19H01L 2924/19105H01L 25/16H01L 21/565H01L 2924/01078H01L 2924/01029H01L 24/16H01L 2924/181H01L 2224/96H01L 21/6835H01L 2224/48091H01L 23/3107H01L 2224/48227H01L 2221/68345H01L 24/48H01L 2924/3025H01L 23/522H01L 21/56H01L 23/5389H01L 24/19H01L 2224/97H01L 21/50H01L 2924/00014H01L 24/96H01L 2224/16225H01L 24/97H01L 21/568H01L 25/50H01L 2924/01006H01L 2924/014H01L 2924/01033H01L 2924/01005H01L 2924/15174H01L 2924/14
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Claims

Abstract

A reconstituted wafer includes a rigid mass with a flat surface and a base surface disposed parallel planar to the flat surface. A plurality of dice are embedded in the rigid mass. The plurality of dice include terminals that are exposed through coplanar with the flat surface. A process of forming the reconstituted wafer includes removing some of the rigid mass to expose the terminals, while retaining the plurality of dice in the rigid mass. A process of forming an apparatus includes separating one apparatus from the reconstituted wafer.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A microelectronic package, comprising:
 a first semiconductor die having first terminals extending from an active side of the first semiconductor die;   a second semiconductor die having second terminals extending from an active side of the second semiconductor die;   an encapsulation mass wherein a backside surface of the encapsulation mass is coplanar with a backside surface of the first semiconductor die and a backside surface of the second semiconductor die; and   at least one dielectric layer and at least one metallization over the first terminals and second terminals, wherein the at least one metallization electrically connects the first semiconductor die and the second semiconductor die.   
     
     
         2 . The microelectronic package of  claim 1 , wherein a topside of the encapsulation mass is coplanar with the first terminals and the second terminals. 
     
     
         3 . The microelectronic package of  claim 2 , wherein a topside of the encapsulation mass and the first terminals and the second terminals include a mechanically planarized surface. 
     
     
         4 . The microelectronic package of  claim 1 , wherein the first semiconductor die includes a processor and wherein the second semiconductor die includes a memory die. 
     
     
         5 . The microelectronic package of  claim 1 , wherein the encapsulation mass includes epoxy. 
     
     
         6 . A microelectronic package, comprising:
 a first semiconductor die having first terminals extending from an active side of the first semiconductor die;   a second semiconductor die having second terminals extending from an active side of the second semiconductor die;   an encapsulation mass wherein a backside surface of the encapsulation mass is coplanar with a backside surface of the first semiconductor die and a backside surface of the second semiconductor die;   a plurality of layers, including at least one dielectric layer and at least one metallization over the first terminals and second terminals, wherein the at least one metallization electrically connects the first semiconductor die and the second semiconductor die; and   an RF die coupled to the plurality of layers on a side opposite the first semiconductor die and the second semiconductor die.   
     
     
         7 . The microelectronic package of  claim 6 , wherein the RF die is wirebonded to the plurality of layers. 
     
     
         8 . The microelectronic package of  claim 6 , further including a passive device coupled to the plurality of layers on the side opposite the first semiconductor die and the second semiconductor die. 
     
     
         9 . The microelectronic package of  claim 8 , wherein the passive device includes an inductor. 
     
     
         10 . The microelectronic package of  claim 8 , wherein the passive device includes a capacitor. 
     
     
         11 . The microelectronic package of  claim 8 , wherein the passive device is attached to the plurality of layers using solder. 
     
     
         12 . The microelectronic package of  claim 8 , further including a third semiconductor die on adjacent to the first semiconductor die and the second semiconductor die wherein a backside surface of the third semiconductor die is coplanar with the backside surface of the encapsulation mass. 
     
     
         13 . The microelectronic package of  claim 12 , further including a fourth semiconductor die on adjacent to the first semiconductor die and the second semiconductor die wherein a backside surface of the fourth semiconductor die is coplanar with the backside surface of the encapsulation mass. 
     
     
         14 . The microelectronic package of  claim 13 , further including a fifth semiconductor die on adjacent to the first semiconductor die and the second semiconductor die wherein a backside surface of the fifth semiconductor die is coplanar with the backside surface of the encapsulation mass. 
     
     
         15 . The microelectronic package of  claim 6 , wherein a topside of the encapsulation mass is coplanar with the first terminals and the second terminals. 
     
     
         16 . The microelectronic package of  claim 15 , wherein a topside of the encapsulation mass and the first terminals and the second terminals include a mechanically planarized surface. 
     
     
         17 . The microelectronic package of  claim 6 , wherein the first semiconductor die includes a processor and wherein the second semiconductor die includes a memory die. 
     
     
         18 . The microelectronic package of  claim 6 , wherein the encapsulation mass includes epoxy.

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