US2022214609A1PendingUtilityA1
Blank mask and photomask using the same
Est. expiryDec 31, 2040(~14.5 yrs left)· nominal 20-yr term from priority
Inventors:Hyung Joo LeeKyuhun KimJiyeon RyuInkyun ShinSeong Yoon KimSuk Young ChoiSuhyeon KimSung Hoon SonMin Gyo Jeong
G03F 1/32G03F 1/30G03F 1/29G03F 1/26
66
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Claims
Abstract
A blank mask including a transparent substrate, a phase shift film disposed on the transparent substrate, and a light shielding film disposed on the phase shift film. The phase shift film has XRD maximum peak at 2θ of 15° to 30° when normal mode XRD analysis is performed on an upper surface of the phase shift film. The transparent substrate has XRD maximum peak at 2θ of 15° to 30° when performing normal mode XRD analysis on a lower surface of the transparent substrate. AI1 value of the blank mask expressed by below Equation is 0.9 to 1.1.AI1=XM1XQ1XM1 is the maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on upper surface of the phase shift film. XQ1 is the maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on the lower surface of the transparent substrate.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A blank mask comprising:
a transparent substrate; a phase shift film disposed on the transparent substrate; and a light shielding film disposed on at least some of the phase shift film; wherein the blank mask is analyzed by normal mode XRD (X-Ray Diffraction), wherein the phase shift film has a XRD maximum peak at 2θ of 15° to 30° when the normal mode XRD analysis is performed on an upper surface of the phase shift film, wherein the transparent substrate has a XRD maximum peak at 2θ of 15° to 30° when the normal mode XRD analysis is performed on a lower surface of the transparent substrate, and wherein the blank mask has AI1 value of 0.9 to 1.1 expressed by Equation 1 below;
AI
1
=
XM
1
XQ
1
[
Equation
1
]
where in the Equation 1,
the XM1 is a maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on the upper surface of the phase inversion film, and
the XQ1 is a maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on the lower surface of the transparent substrate.
2 . The blank mask of claim 1 ,
which is analyzed by fixed mode XRD, wherein the phase shift film has a first peak, which is the XRD maximum peak at 2θ of 15° to 25° when the fixed mode XRD analysis is performed on the upper surface of the phase shift film, wherein the transparent substrate has a second peak, which is the XRD maximum peak at 2θ of 15° to 25° when the fixed mode XRD analysis is performed on the lower surface of the transparent substrate, and wherein AI2 value expressed by Equation 2 below is 0.9 to 1.1;
AI
2
=
XM
2
XQ
2
[
Equation
2
]
wherein the Equation 2,
the XM2 is the intensity value of the first peak, and
the XQ2 is the intensity value of the second peak.
3 . The blank mask of claim 1 ,
wherein A13 value expressed by Equation 3 below is 0.9 to 1.1;
AI
3
=
AM
1
AQ
1
[
Equation
3
]
wherein the Equation 3,
the AM1 is an area of the region where 2θ is 15° to 30° in the X-ray intensity graph measured when normal mode XRD analysis is performed on the upper surface of the phase inversion film, and
the AQ1 is an area of the region where 2θ is 15° to 30° in an X-ray intensity graph measured when normal mode XRD analysis is performed on the lower surface of the transparent substrate.
4 . The blank mask of claim 3 ,
wherein AI4 value expressed by Equation 4 below is 0.9 to 1.1;
AI
4
=
XM
4
XQ
4
[
Equation
4
]
wherein the Equation 4,
the XM4 is the X-ray intensity where 2θ is 43° when the normal mode XRD analysis performed on the upper surface of the phase inversion film, and
the XQ4 is the X-ray intensity where 2θ is 43° when the normal mode XRD analysis performed on the lower surface of the transparent substrate.
5 . The blank mask of claim 1 ,
wherein a photon energy of incident light at the point where the Del_1 value according to Equation 7 below is 0 is 1.8 to 2.14 eV when PE 1 is 1.5 eV and PE 2 is 3 eV;
Del_
1
=
lim
Δ
P
E
→
0
(
Δ
D
P
S
Δ
P
E
)
[
Equation
7
]
wherein the Equation 7, the DPS value is a phase difference between the P wave and the S wave of reflected light if the phase difference between the P wave and the S wave of the reflected light is 180° or less or a value obtained by subtracting the phase difference between the P wave and the S wave of the reflected light from 360° if the phase difference between the P wave and the S wave of the reflected light is more than 180°, when the phase shift film is measured with a spectroscopic ellipsometer by applying an incident angle of 64.5°, and
the PE value is the photon energy of the incident light within the range of the PE 1 value to the PE 2 value.
6 . The blank mask of claim 1 ,
wherein the photon energy of incident light at the point where the Del_1 value according to Equation 7 below is 0 is 3.8 to 4.64 eV when the PE 1 value is 3.0 eV and the PE 2 value is 5.0 eV;
Del_
1
=
lim
Δ
P
E
→
0
(
Δ
D
P
S
Δ
P
E
)
[
Equation
7
]
where in the Equation 7, the DPS value is the phase difference between the P wave and the S wave of reflected light if the phase difference between the P wave and the S wave of the reflected light is 180° or less, or a value obtained by subtracting the phase difference between the P wave and the S wave of the reflected light from 360° if the phase difference between the P wave and the S wave of the reflected light is more than 180°, when the phase shift film is measured with a spectroscopic ellipsometer by applying an incident angle of 64.5°, and
the PE value is the photon energy of the incident light within the range of the PE 1 value to the PE 2 value.
7 . A blank mask comprising:
a transparent substrate; a phase shift film disposed on the transparent substrate; and a light shielding film disposed on the phase shift film; wherein the blank mask has the photon energy of the incident light at the point where Del_1 expressed by Equation 7 below is 0 is 3.8 to 4.64 eV, when the PE 1 value is 3.0 eV and the PE 2 value is 5.0 eV;
Del_
1
=
lim
Δ
P
E
→
0
(
Δ
D
P
S
Δ
P
E
)
[
Equation
7
]
where in the Equation 7,
the DPS value is, after removing the light shielding film from the blank mask, the phase difference between the P wave and the S wave of reflected light if the phase difference between the P wave and S wave of the reflected light is 180° or less, or a value obtained by subtracting the phase difference between the P wave and the S wave of the reflected light from 360° if the phase difference between the P wave and the S wave of the reflected light is more than 180° when the surface of the phase shift film is measured with a spectroscopic ellipsometer by applying an incident angle of 64.5°, and
the PE value is the photon energy of the incident light within the range of PE 1 to PE 2 .
8 . The blank mask of claim 7 ,
wherein the photon energy of the incident light at the point where the Del_1 value is 0 is 1.8 to 2.14 eV, when the PE 1 value is 1.5 eV and the PE 2 value is 3.0 eV.
9 . The blank mask of claim 7 ,
wherein the average value of the Del_1 is 78 to 98°/eV, when the PE 1 value is 1.5 eV and the PE 2 value is the minimum value within photon energy values of incident light at the point where the Del_1 value is 0.
10 . The blank mask of claim 7 ,
wherein the average value of the Del_1 is −65 to −55°/eV, when the PE 1 value is the minimum value within photon energy values of the incident light at the point where the Del_1 value is 0, and the PE 2 value is the maximum value within the photon energy values of the incident light at the point where the Del_1 value is 0.
11 . The blank mask of claim 7 ,
wherein the average value of the Del_1 is 60 to 120°/eV, when the PE 1 value is the maximum value within photon energy values of incident light at a point where the Del_1 value is 0, and when the PE 2 value is 5.0 eV.
12 . The blank mask of claim 7 ,
wherein the maximum value of the Del_1 value is 105 to 300°/eV, when the PE 1 value is 1.5 eV and the PE 2 value is 5.0 eV.
13 . The blank mask of claim 12 ,
wherein the photon energy of the incident light at the point where the maximum value of the Del_1 value is 4.5 eV or more.
14 . The blank mask of claim 1 ,
wherein the phase shift film comprises a phase difference adjustment layer and a protective layer disposed on the phase difference adjustment layer, and wherein the phase shift film comprises a transition metal, silicon, oxygen and nitrogen, wherein the phase difference adjustment layer comprises nitrogen in an amount of 40 to 60 atom %, wherein the protective layer comprises nitrogen in an amount of 20 to 40 atom %, and wherein the protective layer comprises a region in which the ratio of nitrogen content to oxygen content in the thickness direction is 0.4 to 2, and the region has a thickness of 30 to 80% compared to a total thickness of the protective layer.
15 . A photomask comprising:
a transparent substrate; a phase shift film disposed on the transparent substrate; and a light shielding film disposed on at least some of the phase shift film, wherein the photomask is analyzed by normal mode XRD, wherein the phase shift film has a XRD maximum peak at 20 of 15° to 30° when normal mode XRD analysis is performed on an upper surface of the phase shift film, wherein the transparent substrate has a XRD maximum peak at 20 of 15° to 30° when the normal mode XRD analysis is performed on a lower surface of the transparent substrate, and wherein the blank mask has AI1 value of 0.9 to 1.1 expressed by Equation 1 below is;
AI
1
=
XM
1
XQ
1
[
Equation
1
]
where in the Equation 1,
the XM1 is the maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on the phase shift film, and
the XQ1 is the maximum value of the measured X-ray intensity when the normal mode XRD analysis is performed on the lower surface of the transparent substrate.Cited by (0)
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