Silicon carbide ingot, method of preparing the same, and method for preparing silicon carbide wafer

Abstract

A SiC ingot includes: a main body including a first cross-sectional plane of the main body and a second cross-sectional plane of the main body facing the first cross-sectional plane; and a protrusion disposed on the second cross-sectional plane and including a convex surface from the second cross-sectional plane of the main body, wherein a first end point disposed at one end of the second cross sectional plane, a second end point disposed at another end of the second cross sectional plane, and a peak point disposed on the convex surface are disposed on a third cross-sectional plane of the main body perpendicular to the first cross-sectional plane, and wherein a radius of curvature of an arc corresponding to a line of intersection between the third cross-sectional plane and the convex surface satisfies Equation 1 below:3D≤r≤37D  [Equation 1]where r is the radius of curvature of the arc corresponding to the line of intersection between the third cross-sectional plane and the convex surface, and D is a length of a line of intersection between the first cross-sectional plane and the third cross-sectional plane.

What is claimed is: 
     
         1 . A SiC ingot, comprising:
 a main body comprising a first cross-sectional plane of the main body and a second cross-sectional plane of the main body facing the first cross-sectional plane; and   a protrusion disposed on the second cross-sectional plane and comprising a convex surface,   wherein the SiC ingot comprises a first reference line perpendicular to the first cross-sectional plane of the main body and passing through a center of the first cross-sectional plane of the main body, a second reference line parallel to the first reference line and in contact with an edge of the protrusion disposed farthest from the first reference in a vertical distance, a third reference line parallel to the first cross-sectional plane of the main body and passing through a contact point between the edge of the protrusion and the second reference line, and a fourth reference line passing through the contact point and a peak point of the convex surface, and   wherein an angle between the third reference line and the fourth reference line is 0.5 degree to 10 degree,   wherein a first end point disposed at one end of the second cross sectional plane, a second end point disposed at another end of the second cross sectional plane, and a peak point disposed on the convex surface are disposed on a third cross-sectional plane of the main body perpendicular to the first cross-sectional plane, and   wherein a radius of curvature of an arc corresponding to a line of intersection between the third cross-sectional plane and the convex surface satisfies Equation 1 below:
   3 D≤r≤ 37 D   [Equation 1]
 
   where r is the radius of curvature of the arc corresponding to the line of intersection between the third cross-sectional plane and the convex surface, and D is a length of a line of intersection between the first cross-sectional plane and the third cross-sectional plane.   
     
     
         2 . The SiC ingot of  claim 1 , wherein the SiC ingot comprises a 4H—SiC crystal structure, and a locking angle of a wafer prepared from the SiC ingot with an off angle to a (0001) plane of the SiC ingot set as 0 to 10 degree is −1.5 degree to +1.5 degree relative to a reference angle. 
     
     
         3 . The SiC ingot of  claim 1 , wherein a number of pits on a surface of the SiC ingot is 10,000/cm 2  or less. 
     
     
         4 . A SiC ingot comprising:
 a main body including a first cross-sectional plane of the main body and a second cross-sectional plane of the main body facing the first cross-sectional plane; and   a protrusion disposed on the second cross-sectional plane and including a convex surface from the second cross-sectional plane of the main body,   wherein a first end point disposed at one end of the second cross sectional plane, a second end point disposed at another end of the second cross sectional plane, and a peak point disposed on the convex surface are disposed on a third cross-sectional plane of the main body perpendicular to the first cross-sectional plane, and   wherein a radius of curvature of an arc corresponding to a line of intersection between the third cross-sectional plane and the convex surface satisfies Equation 1 below:
   3 D≤r≤ 37 D   [Equation 1]
 
   where r is the radius of curvature of the arc corresponding to the line of intersection between the third cross-sectional plane and the convex surface, and D is a length of a line of intersection between the first cross-sectional plane and the third cross-sectional plane.