Substrate transport apparatus

Abstract

A substrate transport apparatus having a frame, a drive section and an articulated arm. The drive section has at least one motor module that is selectable for placement in the drive section from a number of different interchangeable motor modules. Each having a different predetermined characteristic. The articulated arm has articulated joints. The arm is connected to the drive section for articulation. The arm has a selectable configuration selectable from a number of different arm configurations each having a predetermined configuration characteristic. The selection of the arm configuration is effected by selection of the at least one motor module for placement in the drive section.

What is claimed is: 
     
         1 . A substrate transport apparatus comprising:
 a frame;   a drive section connected to the frame, the drive section including a shoulder drive section disposed in the frame and an articulated joint drive section; and   an articulated arm having a configuration that has a common shoulder joint and a predetermined number of articulating joints, the articulated arm being connected to the drive section for articulation of at least one of the articulating joints so that the articulating joints are moved independently by the drive section and effect transport motion with the articulated arm along a transport plane;   wherein the frame is of a semi-monocoque configuration and includes a substantially rigid spine with an integral collar that includes a turret of the articulated arm that suspends the articulated arm through the collar, the turret and collar include and engage each motor of the articulated joint drive section so that each motor depends from the substantially rigid spine and static and dynamic driving loads generated by all motors of the articulated joint drive section and all drive transmissions drivingly coupling the motors of the articulated joint drive section to the articulated arm effecting the transport motion of the articulated arm bear against and are transmitted via the substantially rigid spine to the semi-monocoque frame so as to be borne by the semi-monocoque frame and the substantially rigid spine, integral to and with the semi-monocoque frame.