Assignee
BROOKS AUTOMATION US LLC
US·27 granted patents·23 pending applications·5 citations·filing 2020–2025
Top patents by PatentIndex Score
50 records- 0195US11862498B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Jan 2, 2024·2 cites·22 claims
- 0289US12162698B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Dec 10, 2024·1 cites·33 claims
- 0387US11658051B2Substrate transportBROOKS AUTOMATION US LLC·Filed 2021·Granted May 23, 2023·1 cites·23 claims
- 0487US2024063682A1Sealed robot driveBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 0587US2024109187A1Compact direct drive spindleBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 0684US12266554B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2024·Granted Apr 1, 2025·0 cites·20 claims
- 0784US2023280740A1Intelligent condition monitoring and fault diagnostic system for preventative maintenanceBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 0883US12300528B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2024·Granted May 13, 2025·0 cites·18 claims
- 0983US11772261B2Compact direct drive spindleBROOKS AUTOMATION US LLC·Filed 2022·Granted Oct 3, 2023·0 cites·16 claims
- 1083US2024085481A1Method and apparatus for brushless electrical machine controlBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 1182US12564003B2Substrate mapping apparatus and method thereforBROOKS AUTOMATION US LLC·Filed 2024·Granted Feb 24, 2026·1 cites·23 claims
- 1281US12263587B2Dual arm robotBROOKS AUTOMATION US LLC·Filed 2023·Granted Apr 1, 2025·0 cites·21 claims
- 1381US11908721B2Tool auto-teach method and apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Feb 20, 2024·0 cites·20 claims
- 1481US2025069939A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2024·Application pending·0 cites
- 1580US12539612B2Method and apparatus for health assessment of a transport apparatusBROOKS AUTOMATION US LLC·Filed 2023·Granted Feb 3, 2026·0 cites·22 claims
- 1680US2025253179A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2025·Application pending·0 cites
- 1779US11978649B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2021·Granted May 7, 2024·0 cites·14 claims
- 1879US11894252B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2023·Granted Feb 6, 2024·0 cites·20 claims
- 1978US2022111514A1Compact direct drive spindleBROOKS AUTOMATION US LLC·Filed 2021·Application pending·0 cites
- 2078US2024112937A1On the fly automatic wafer centering method and apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 2177US11787058B2Method and apparatus for health assessment of a transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Oct 17, 2023·0 cites·22 claims
- 2277US2023335414A1Load lock fast pump ventBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 2375US12002694B2Load port moduleBROOKS AUTOMATION US LLC·Filed 2023·Granted Jun 4, 2024·0 cites·20 claims
- 2475US11978651B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted May 7, 2024·0 cites·20 claims
- 2575US11923729B2Position feedback for sealed environmentsBROOKS AUTOMATION US LLC·Filed 2022·Granted Mar 5, 2024·0 cites·19 claims
- 2675US2024001535A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 2775US2024105493A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 2875US2023386879A1Process apparatus with on-the-fly substrate centeringBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 2974US2025088075A1Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2024·Application pending·0 cites
- 3074US2025087514A1Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2024·Application pending·0 cites
- 3174US2024087938A1Automatic wafer centering method and apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 3273US11691267B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2021·Granted Jul 4, 2023·0 cites·20 claims
- 3372US12575375B2Transport apparatus and adapter pendantBROOKS AUTOMATION US LLC·Filed 2023·Granted Mar 10, 2026·0 cites·18 claims
- 3472US12068186B2Load port moduleBROOKS AUTOMATION US LLC·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 3572US11823944B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Nov 21, 2023·0 cites·24 claims
- 3671US11650581B2Intelligent condition monitoring and fault diagnostic system for preventative maintenanceBROOKS AUTOMATION US LLC·Filed 2020·Granted May 16, 2023·0 cites·32 claims
- 3770US12142505B2Transport apparatus with linear bearingBROOKS AUTOMATION US LLC·Filed 2022·Granted Nov 12, 2024·0 cites·32 claims
- 3869US11664259B2Process apparatus with on-the-fly substrate centeringBROOKS AUTOMATION US LLC·Filed 2020·Granted May 30, 2023·0 cites·15 claims
- 3967US11830749B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2023·Granted Nov 28, 2023·0 cites·17 claims
- 4067US2022410373A1Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Application pending·0 cites
- 4165US2023271792A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Application pending·0 cites
- 4265US2024096672A1Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 4363US2023245910A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 4462US2024355654A1Substrate processing systemBROOKS AUTOMATION US LLC·Filed 2024·Application pending·0 cites
- 4560US12519000B2Automated teach apparatus for robotic systems and method thereforBROOKS AUTOMATION US LLC·Filed 2023·Granted Jan 6, 2026·0 cites·23 claims
- 4659US2024066685A1Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanismBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 4758US11894253B2Method and apparatus for substrate alignmentBROOKS AUTOMATION US LLC·Filed 2022·Granted Feb 6, 2024·0 cites·40 claims
- 4858US2024379396A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2023·Application pending·0 cites
- 4957US2024088764A1Sealed switched reluctance motorBROOKS AUTOMATION US LLC·Filed 2022·Application pending·0 cites
- 5055US12206342B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Jan 21, 2025·0 cites·37 claims
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