Substrate processing apparatus

Abstract

A substrate processing apparatus includes a frame and a transport apparatus connected to the frame. The transport apparatus has an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis. A two degree of freedom drive system is operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within the stack height profile of the wrist axis so that a total stack height of the end effector and wrist axis is sized to conform within a pass through of a slot valve.

What is claimed is: 
     
         1 . A substrate processing apparatus comprises:
 a frame;   a transport apparatus connected to the frame, the transport apparatus having an upper arm link, a forearm link rotatably coupled to the upper arm link about an elbow axis, at least a third arm link rotatably coupled to the forearm link about a wrist axis, and an end effector rotatably coupled to the third arm link about a knuckle axis; and   at least a two degree of freedom drive system operably connected to at least one of the upper arm link, the forearm link, and the third arm link for effecting extension and retraction of the end effector wherein a height of the end effector is within a stack height profile of stacked arm links joined at the wrist axis so that a total stack height of the end effector and the stacked arm links joint at the wrist axis is sized to conform within a pass through of a slot valve.