Method for inspecting a container and inspection system

Abstract

The present disclosure relates to a method for inspecting a container body adapted and configured to hold substrates, comprising the steps of directing light from a light source onto a reflector element positioned within an interior space of the container body, such that the light is reflected to illuminate at least one interior surface of the container body, wherein the light is reflected by the reflector element in a diffuse manner and generating at least one image of the at least one interior surface by means of at least one camera, and evaluating the state of the container body on the basis of the at least one image.

What is claimed is: 
     
         1 . A method for inspecting a container body configured to hold substrates, the method comprising:
 directing light from a light source onto a diffuse reflector positioned within an interior space of the container body, such that diffuse reflection light homogenously illuminates at least one interior surface of the container body;   with at least one camera, at least one homogenously illuminated image of the at least one interior surface effected by the diffuse reflection light; and   evaluating the state of the container body on the basis of the at least one image.