Assignee
BROOKS AUTOMATION GERMANY GMBH
DE·21 granted patents·10 pending applications·14 citations·filing 2014–2024
Top patents by PatentIndex Score
31 records- 0186US10026604B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2016·Granted Jul 17, 2018·2 cites·13 claims
- 0285US11515189B2Automatic handling buffer for bare stockerBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Granted Nov 29, 2022·1 cites·12 claims
- 0385US11372625B2Tool compilerBROOKS AUTOMATION GERMANY GMBH·Filed 2019·Granted Jun 28, 2022·4 cites·12 claims
- 0484US9868140B2Recirculation substrate container purging systemsBROOKS AUTOMATION (GERMANY) GMBH·Filed 2016·Granted Jan 16, 2018·3 cites·13 claims
- 0582US11152203B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Oct 19, 2021·1 cites·20 claims
- 0680US11978652B2Automatic handling buffer for bare stockerBROOKS AUTOMATION GERMANY GMBH·Filed 2022·Granted May 7, 2024·0 cites·12 claims
- 0780US2025006527A1Inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 0879US2025050382A1Method for cleaning a synthetic surfaceBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 0978US10065222B2Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2014·Granted Sep 4, 2018·1 cites·6 claims
- 1078US2023062287A1Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Application pending·0 cites
- 1177US10452362B2Tool compilerBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Oct 22, 2019·2 cites·8 claims
- 1277US2023085278A1Integrated handling system for semiconductor articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2022·Application pending·0 cites
- 1377US2023135865A1Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Application pending·0 cites
- 1476US2024226969A1Method for cleaning a synthetic surfaceBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 1572US11167322B2Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Nov 9, 2021·0 cites·20 claims
- 1671US10872796B2Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2019·Granted Dec 22, 2020·0 cites·14 claims
- 1768US12087603B2Inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Granted Sep 10, 2024·0 cites·18 claims
- 1868US11107715B2Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Aug 31, 2021·0 cites·21 claims
- 1967US2018350589A1Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Application pending·0 cites
- 2063US12461453B2EUV reticle stocker and method of operating the sameBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Granted Nov 4, 2025·0 cites·21 claims
- 2163US10453722B2Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2016·Granted Oct 22, 2019·0 cites·28 claims
- 2260US10930536B2Workpiece stocker with circular configurationBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Feb 23, 2021·0 cites·20 claims
- 2359US10741431B2Automatic handling buffer for bare stockerBROOKS AUTOMATION (GERMANY) GMBH·Filed 2017·Granted Aug 11, 2020·0 cites·12 claims
- 2457US11872603B2Method for cleaning a synthetic surfaceBROOKS AUTOMATION GERMANY GMBH·Filed 2017·Granted Jan 16, 2024·0 cites·10 claims
- 2557US2025306452A1Stocker pod, method and stocker for storing a semiconductor fabrication articleBROOKS AUTOMATION GERMANY GMBH·Filed 2023·Application pending·0 cites
- 2655US10593576B2Inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2016·Granted Mar 17, 2020·0 cites·26 claims
- 2754US12288697B2Core module for semiconductor production facility machineryBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Granted Apr 29, 2025·0 cites·14 claims
- 2853US2023187244A1Method for inspecting a container and inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2023·Application pending·0 cites
- 2947US12550667B2Method and system for inspection of an inner pod or an outer pod of an EUV podBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Granted Feb 10, 2026·0 cites·15 claims
- 3044US2023011873A1Euv reticle stocker and method of operating the sameBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Application pending·0 cites
- 3142US11569107B2Method for inspecting a container and inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Jan 31, 2023·0 cites·12 claims
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