Semiconductor stocker systems and methods

Abstract

In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.

1 . A robot for transferring a workpiece, the robot comprising:
 a robot arm having a gripper for supporting a workpiece, the gripper being located at a first end of the robot arm, wherein each workpiece is carried by the gripper with movement of the robot arm that transports the carried workpiece, and the movement of the robot arm and transport, of the carried workpiece, effected by the movement of the robot arm are common and correspond uniquely with respect to each other, for each different workpiece transported and carried by the gripper;   at least one gas flow sensor coupled to the gripper, wherein the at least one gas flow sensor is disposed so that the at least one gas flow sensor has a position relative to the carried workpiece, carried by the gripper, so that for each different workpiece transported and carried by the gripper the at least one gas flow sensor senses advanced presence of gas flow from at least one nozzle coincident with the common movement of the robot arm that corresponds uniquely to and transports the carried workpiece common with its transport, and common movement of the robot arm corresponding uniquely thereto, to the at least one nozzle and effects engagement of the carried workpiece with the at least one nozzle, the advanced presence being advanced relative the carried workpiece, carried by the gripper in the common movement; and   a robot arm mechanism coupled to a second end of the robot arm, wherein the robot arm mechanism is configured to move the robot arm.