Inventor · disambiguated record
Lutz Rebstock
Also filed as: REBSTOCK LUTZ
66 granted patents·16 pending applications·268 citations·filing 2005–2024
98Inventor score
Files withREBSTOCK LUTZ30BROOKS AUTOMATION GERMANY GMBH26BROOKS CCS GMBH10DYNAMIC MICRO SYSTEMS7DYNAMIC MICRO SYSTEMS SEMICONDUCTOR EQUIPMENT GMBH4
Top patents by PatentIndex Score
82 records- 0198US8720370B2Methods and apparatuses for roll-on coatingREBSTOCK LUTZ·Filed 2011·Granted May 13, 2014·32 cites·20 claims
- 0297US8696042B2Semiconductor cleaner systems and methodsREBSTOCK LUTZ·Filed 2012·Granted Apr 15, 2014·25 cites·15 claims
- 0395US9004561B2Semiconductor cleaner systems and methodsREBSTOCK LUTZ·Filed 2014·Granted Apr 14, 2015·12 cites·13 claims
- 0495US8070410B2Scalable stocker with automatic handling bufferREBSTOCK LUTZ·Filed 2008·Granted Dec 6, 2011·26 cites·10 claims
- 0594US9401270B2Semiconductor cleaner systems and methodsBROOKS CCS GMBH·Filed 2015·Granted Jul 26, 2016·7 cites·7 claims
- 0694US8753063B2Removable compartments for workpiece stockerREBSTOCK LUTZ·Filed 2011·Granted Jun 17, 2014·14 cites·16 claims
- 0794US7896602B2Workpiece stocker with circular configurationREBSTOCK LUTZ·Filed 2007·Granted Mar 1, 2011·22 cites·12 claims
- 0892US8764370B2Scalable stockers with automatic handling bufferREBSTOCK LUTZ·Filed 2011·Granted Jul 1, 2014·10 cites·8 claims
- 0991US8888434B2Container storage add-on for bare workpiece stockerREBSTOCK LUTZ·Filed 2011·Granted Nov 18, 2014·9 cites·21 claims
- 1090US9524892B2Semiconductor stocker systems and methodsREBSTOCK LUTZ·Filed 2012·Granted Dec 20, 2016·6 cites·20 claims
- 1188US9633881B2Automatic handling buffer for bare stockerREBSTOCK LUTZ·Filed 2008·Granted Apr 25, 2017·9 cites·20 claims
- 1288US9064687B2Substrate carrier having drip edge configurationsDYNAMIC MICRO SYSTEMS·Filed 2013·Granted Jun 23, 2015·10 cites·7 claims
- 1388US8651539B1Integrated gripper for workpiece transferREBSTOCK LUTZ·Filed 2013·Granted Feb 18, 2014·6 cites·18 claims
- 1488US8376428B2Integrated gripper for workpiece transferDynamic Micro System Semiconductor Equipment GmbH·Filed 2007·Granted Feb 19, 2013·15 cites·11 claims
- 1587US8777540B2Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafersREBSTOCK LUTZ·Filed 2008·Granted Jul 15, 2014·16 cites·21 claims
- 1686US11024526B2Robot with gas flow sensor coupled to robot armREBSTOCK LUTZ·Filed 2012·Granted Jun 1, 2021·4 cites·27 claims
- 1786US10026604B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2016·Granted Jul 17, 2018·2 cites·13 claims
- 1885US11515189B2Automatic handling buffer for bare stockerBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Granted Nov 29, 2022·1 cites·12 claims
- 1985US9312152B2Recirculation substrate container purging systems and methodsBROOKS CCS GMBH·Filed 2014·Granted Apr 12, 2016·5 cites·7 claims
- 2085US8739728B2Methods and apparatuses for roll-on coatingREBSTOCK LUTZ·Filed 2011·Granted Jun 3, 2014·4 cites·22 claims
- 2184US9868140B2Recirculation substrate container purging systemsBROOKS AUTOMATION (GERMANY) GMBH·Filed 2016·Granted Jan 16, 2018·3 cites·13 claims
- 2284US8795785B2Methods and apparatuses for roll-on coatingREBSTOCK LUTZ·Filed 2011·Granted Aug 5, 2014·3 cites·19 claims
- 2384US8161985B2Method and apparatus for cleaning articles used in the production of semiconductorsMORAN THOMAS J·Filed 2005·Granted Apr 24, 2012·8 cites·21 claims
- 2483US8591664B2Integrated cleaner and dryer systemREBSTOCK LUTZ·Filed 2010·Granted Nov 26, 2013·4 cites·16 claims
- 2582US11152203B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Oct 19, 2021·1 cites·20 claims
- 2681US9646817B2Semiconductor cleaner systems and methodsREBSTOCK LUTZ·Filed 2012·Granted May 9, 2017·2 cites·11 claims
- 2780US11978652B2Automatic handling buffer for bare stockerBROOKS AUTOMATION GERMANY GMBH·Filed 2022·Granted May 7, 2024·0 cites·12 claims
- 2880US2025006527A1Inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 2979US2025050382A1Method for cleaning a synthetic surfaceBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 3078US10065222B2Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2014·Granted Sep 4, 2018·1 cites·6 claims
- 3178US2023062287A1Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Application pending·0 cites
- 3277US2023085278A1Integrated handling system for semiconductor articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2022·Application pending·0 cites
- 3377US2023135865A1Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2021·Application pending·0 cites
- 3476US2024226969A1Method for cleaning a synthetic surfaceBROOKS AUTOMATION GERMANY GMBH·Filed 2024·Application pending·0 cites
- 3574US11587816B2Container storage add-on for bare workpiece stockerBROOKS CCS GMBH·Filed 2021·Granted Feb 21, 2023·0 cites·20 claims
- 3674US9947565B2Workpiece stocker with circular configurationREBSTOCK LUTZ·Filed 2011·Granted Apr 17, 2018·2 cites·7 claims
- 3773US10096461B2Semiconductor cleaner systems and methodsREBSTOCK LUTZ·Filed 2012·Granted Oct 9, 2018·1 cites·10 claims
- 3873US9536763B2Semiconductor stocker systems and methodsREBSTOCK LUTZ·Filed 2012·Granted Jan 3, 2017·1 cites·13 claims
- 3973US7751919B2Method for operating equipment using buffer station having emergency accessDYNAMIC MICRO SYSTEMS·Filed 2007·Granted Jul 6, 2010·3 cites·20 claims
- 4072US11167322B2Cleaning systems and methods for semiconductor substrate storage articlesBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Nov 9, 2021·0 cites·20 claims
- 4171US10872796B2Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2019·Granted Dec 22, 2020·0 cites·14 claims
- 4268US12087603B2Inspection systemBROOKS AUTOMATION GERMANY GMBH·Filed 2020·Granted Sep 10, 2024·0 cites·18 claims
- 4368US11107715B2Semiconductor stocker systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Granted Aug 31, 2021·0 cites·21 claims
- 4468US10892155B2Semiconductor cleaner systems and methodsBROOKS AUTOMATION GMBH·Filed 2018·Granted Jan 12, 2021·0 cites·22 claims
- 4568US9122272B2Redundantable robot assembly for workpiece transferREBSTOCK LUTZ·Filed 2007·Granted Sep 1, 2015·2 cites·14 claims
- 4668US2016303622A1Cleaning Systems and Methods for Semiconductor Substrate Storage ArticlesBROOKS CCS GMBH·Filed 2014·Application pending·0 cites
- 4767US11049750B2Container storage add-on for bare workpiece stockerBROOKS CCS GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·1 claims
- 4867US9701024B2Integrated gripper for workpiece transferBROOKS CCS GMBH·Filed 2014·Granted Jul 11, 2017·1 cites·20 claims
- 4967US2018350589A1Semiconductor cleaner systems and methodsBROOKS AUTOMATION GERMANY GMBH·Filed 2018·Application pending·0 cites
- 5065US11171024B2Reticle compartment and diffusor plateBROOKS AUTOMATION GMBH·Filed 2020·Granted Nov 9, 2021·0 cites·20 claims
Showing the top 50 of 82 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →