Magnetic property measuring system, a method for measuring magnetic properties, and a method for manufacturing a magnetic memory device using the same

Abstract

A magnetic property measuring system includes a stage configured to hold a sample and a magnetic structure disposed over the stage. The stage includes a body part, a magnetic part adjacent the body part, and a plurality of holes defined in the body part. The magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample. The stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.

What is claimed is: 
     
         1 . A method of measuring magnetic properties, the method comprising:
 loading a sample on a stage;   fixing the sample on the stage by using a vacuum;   moving a measurement target region of the sample to a light irradiation region;   irradiating incident light to the measurement target region of the sample; and   detecting polarization of reflected light that is reflected from the measurement target region of the sample.   
     
     
         2 . The method of  claim 1 , wherein the moving the measurement target region of the sample to the light irradiation region includes moving the stage in a first direction and in a second direction. 
     
     
         3 . The method of  claim 2 , wherein each of the first direction and the second direction is substantially parallel to a top surface of the sample, and
 the first direction is substantially perpendicular to the second direction.   
     
     
         4 . The method of  claim 1 , further comprising applying a magnetic field substantially perpendicularly to a top surface of the sample. 
     
     
         5 . The method of  claim 1 , further comprising:
 polarizing the incident light that is emitted from a light source; and   polarizing the reflected light.   
     
     
         6 . The method of  claim 1 , wherein the fixing the sample on the stage by using the vacuum includes drawing or sucking air through a plurality of holes. 
     
     
         7 . A method for manufacturing a magnetic memory device, the method comprising:
 forming a magnetic tunnel junction layer on a substrate;   patterning the magnetic tunnel junction layer to form magnetic tunnel junction patterns;   measuring magnetic properties of the magnetic tunnel junction patterns; and   determining whether the measured magnetic properties of the magnetic tunnel junction patterns are within an allowable range,   wherein the measuring the magnetic properties of the magnetic tunnel junction patterns comprises:   loading the substrate on a stage in a magnetic property measuring system;   fixing the substrate on the stage by using a vacuum;   moving a measurement target region of the substrate to a light irradiation region;   irradiating incident light to the measurement target region of the substrate; and   detecting polarization of light that is reflected from the measurement target region of the substrate.   
     
     
         8 . The method of  claim 7 , wherein the moving the measurement target region of the substrate to the light irradiation region includes moving the stage in a first direction and in a second direction. 
     
     
         9 . The method of  claim 8 , wherein each of the first direction and the second direction is substantially parallel to a top surface of the substrate. 
     
     
         10 . The method of  claim 8 , wherein the first direction is substantially perpendicular to the second direction.