Distribution System for a Process Fluid for a Chemical and/or Electrolytic Surface Treatment of a Substrate

Abstract

The disclosure relates to a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate and a manufacturing method for a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate. The distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate comprises a distribution body and a distribution medium. The distribution body comprises several openings for a process fluid and/or an electric current. The distribution medium covers at least some of the openings of the distribution body. The distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body.

1 . A distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate, comprising:
 a distribution body, and   a distribution medium,   
       wherein the distribution body comprises several openings for a process fluid and/or an electric current, 
       wherein the distribution medium covers at least some of the openings of the distribution body, and 
       wherein the distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body. 
     
     
         2 . The distribution system according to  claim 1 , wherein the netted framework forms a sponge with randomly distributed passages. 
     
     
         3 . The distribution system according to  claim 1 , wherein the netted framework forms a grid with evenly distributed passages. 
     
     
         4 . The distribution system according to  claim 1 , wherein the distribution medium is porous. 
     
     
         5 . The distribution system according to  claim 1 , wherein the distribution medium has a porosity in a range of 0.1 to 0.95, preferably 0.4 to 0.9 and more preferably 0.6 to 0.85. 
     
     
         6 . The distribution system according to  claim 1 , wherein the distribution medium has a hydraulic conductivity in a range of 104 to 10 m/s, preferably 10 −3  to 1 m/s and more preferably 10 −3  to 10 −1  m/s. 
     
     
         7 . The distribution system according to  claim 5 , wherein the porosity and/or the hydraulic conductivity is anisotropic. 
     
     
         8 . The distribution system according to  claim 1 , wherein the netted framework comprises a single layer of cells and passages. 
     
     
         9 . The distribution system according to  claim 1 , wherein the netted framework comprises at least two layers of cells and passages. 
     
     
         10 . The distribution system according to  claim 1 , wherein the passages of adjacent layers of cells and passages are partially displaced relative to each other. 
     
     
         11 . The distribution system according to  claim 1 , wherein the passages are interconnected. 
     
     
         12 . The distribution system according to  claim 1 , wherein the openings covered by the distribution medium are jet holes configured to direct the process fluid towards the substrate. 
     
     
         13 . The distribution system according to  claim 1 , wherein the openings covered by the distribution medium are drain holes configured to drain off the process fluid relative to the substrate. 
     
     
         14 . The distribution system according to  claim 1 , wherein the distribution medium covers the distribution body at least partially. 
     
     
         15 . A manufacturing method for a distribution system for a process fluid for a chemical and/or electrolytic surface treatment of a substrate, comprising:
 providing a distribution body, wherein the distribution body comprises several openings for a process fluid and/or an electric current, and   covering at least some openings of the distribution body by means of a distribution medium, wherein the distribution medium comprises a netted framework with passages to distribute the process fluid and/or the electric current from the distribution body.