Formulations for advanced polishing pads

Abstract

Methods and formulations for manufacturing polishing articles used in polishing processes are provided. In one implementation, a UV curable resin precursor composition is provided. The UV curable resin precursor comprises a precursor formulation. The precursor formulation comprises a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is selected from a semi-crystalline aliphatic polyester urethane acrylate, a semi-crystalline aliphatic polycarbonate urethane acrylate, a semi-crystalline aliphatic polyether urethane acrylate, or combinations thereof. The precursor formulation further comprises a second resin precursor component that comprises a monofunctional or multifunctional acrylate monomer. The resin precursor formulation further comprises a photoinitiator, wherein the precursor formulation has a viscosity that enables the precursor formulation to be dispensed to form a portion of a polishing article by an additive manufacturing process.

1 . A method of forming a polishing article, comprising:
 depositing a plurality of composite layers with an additive manufacturing system to reach a target thickness, wherein depositing the plurality of composite layers comprises:
 dispensing one or more droplets of a curable resin precursor composition onto a support, the curable resin precursor composition comprising:
 a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is selected from a semi-crystalline aliphatic polyester urethane acrylate oligomer, a semi-crystalline aliphatic polyether urethane acrylate oligomer, or a combination thereof; 
 a second resin precursor component that comprises an acrylate monomer mixture, comprising:
 a monofunctional acrylate monomer selected from isobornyl acrylate, 3, 3, 5-trimethylcyclohexyl acrylate, tetrahydrofurfuryl acrylate, or combinations thereof; and 
 a multifunctional acrylate monomer selected from dipropylene glycol diacrylate, 1, 4-butanediol diacrylate, 1, 3-butanediol diacrylate, or combinations thereof, wherein the acrylate monomer mixture is present from 70% to 80% by weight based on a total weight of the curable resin precursor composition; and 
 
 a photoinitiator present from 0.5% to 2.5% based on the total weight of the curable resin precursor composition, 
 
   wherein the curable resin precursor composition has a viscosity within a range from about 10 cP to about 30 cP at 70 degrees Celsius that enables the curable resin precursor composition to be dispensed to form a portion of the polishing article by the additive manufacturing system.   
     
     
         2 . The method of  claim 1 , wherein the semi-crystalline aliphatic polyester urethane acrylate oligomer has a functionality that is greater than or equal to 2. 
     
     
         3 . The method of  claim 1 , wherein the monofunctional acrylate monomer is isobornyl acrylate and 3, 3, 5-trimethylcyclohexyl acrylate and the multifunctional acrylate monomer is 1,4-butanediol diacrylate. 
     
     
         4 . The method of  claim 1 , further comprising:
 dispensing one or more droplets of a porosity-forming composition onto the support, wherein at least one component of the porosity-forming composition is removable to form pores in the polishing article.   
     
     
         5 . The method of  claim 4 , wherein the porosity-forming composition comprises a porosity-forming agent selected from glycols, glycol-ethers, amines, or combinations thereof. 
     
     
         6 . The method of  claim 5 , further comprising partially curing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition prior to exposing the dispensed one or more droplets of the curable resin precursor composition and the dispensed one or more droplets of the porosity-forming composition to at least one of an annealing processing, a rinsing process, or both. 
     
     
         7 . The method of  claim 1 , wherein the semi-crystalline aliphatic polyester urethane acrylate oligomer comprises a urea or carboxylic acid hydrogen bonding group. 
     
     
         8 . The method of  claim 1 , wherein the semi-crystalline aliphatic polyester urethane acrylate oligomer is present from 20% to 30% by weight based on a total weight of the curable resin precursor composition. 
     
     
         9 . The method of  claim 1 , wherein the curable resin precursor composition further comprises polymeric fibers or nanoparticles selected from SiO 2  nanoparticles, ZnO nanoparticles, ZnS nanoparticles, and ZrO 2  nanoparticles. 
     
     
         10 . The method of  claim 1 , wherein the monofunctional acrylate monomer is isobornyl acrylate and tetrahydrofurfuryl acrylate, and the multifunctional acrylate monomer is 1,3-butanediol diacrylate. 
     
     
         11 . A method of forming a polishing article, comprising:
 depositing a plurality of composite layers with an additive manufacturing system to reach a target polishing article thickness, wherein depositing the plurality of composite layers comprises:
 dispensing one or more droplets of a curable resin precursor composition onto a support, the curable resin precursor composition comprising: 
 a first resin precursor component that comprises a semi-crystalline radiation curable oligomeric material, wherein the semi-crystalline radiation curable oligomeric material is selected from a semi-crystalline aliphatic polyester urethane acrylate oligomer, a semi-crystalline aliphatic polyether urethane acrylate oligomer, or a combination thereof; 
 a second resin precursor component that comprises an acrylate monomer mixture, comprising:
 a monofunctional acrylate monomer selected from isobornyl acrylate, 3, 3, 5-trimethylcyclohexyl acrylate, tetrahydrofurfuryl acrylate, or combinations thereof; and 
 a multifunctional acrylate monomer selected from dipropylene glycol diacrylate, 1, 4-butanediol diacrylate, 1, 3-butanediol diacrylate, or combinations thereof, wherein the acrylate monomer mixture is present from 70% to 80% by weight based on a total weight of the curable resin precursor composition; and 
 
 a photoinitiator present from 0.5% to 2.5% based on the total weight of the curable resin precursor composition, wherein the curable resin precursor composition has a viscosity within a range from about 10 cP to about 30 cP at 70 degrees Celsius that enables the curable resin precursor composition to be dispensed to form a portion of the polishing article by the additive manufacturing system; 
 exposing the one or more droplets of the curable resin precursor composition to electromagnetic radiation to at least partially cure the curable resin precursor composition; and 
 repeating the dispensing and exposing to build a 3D-relief on the support; and 
 solidifying the plurality of composite layers to form a pad body. 
   
     
     
         12 . The method of  claim 11 , wherein the viscosity is within a range from about 10 cP to about 20 cP at 70 degrees Celsius. 
     
     
         13 . The method of  claim 11 , wherein the semi-crystalline radiation curable oligomeric material has a functionality that is greater than or equal to 2. 
     
     
         14 . The method of  claim 11 , wherein the monofunctional acrylate monomer is isobornyl acrylate and 3, 3, 5-trimethylcyclohexyl acrylate, and the multifunctional acrylate monomer is 1,4-butanediol diacrylate. 
     
     
         15 . The method of  claim 11 , wherein the curable resin precursor composition comprises
 from about 20 to about 30% by weight of the semi-crystalline radiation curable oligomeric material.   
     
     
         16 . The method of  claim 11 , wherein the curable resin precursor composition further comprises polymeric fibers or nanoparticles selected from SiO 2  nanoparticles, ZnO nanoparticles, ZnS nanoparticles, and ZrO 2  nanoparticles. 
     
     
         17 . The method of  claim 11 , wherein the monofunctional acrylate monomer is isobornyl acrylate and tetrahydrofurfuryl acrylate, and the multifunctional acrylate monomer is 1,3-butanediol diacrylate. 
     
     
         18 . A UV curable resin precursor composition, comprising:
 a semi-crystalline radiation curable oligomeric material selected from a semi-crystalline aliphatic polyether urethane acrylate oligomer having a functionality of 2 or greater, a semi-crystalline aliphatic polycarbonate urethane acrylate oligomer, a semi-crystalline aliphatic polyester urethane acrylate oligomer, or a combination thereof;   an acrylate monomer mixture, comprising:
 a monofunctional acrylate monomer selected from isobornyl acrylate, 3, 3, 5-trimethylcyclohexyl acrylate, tetrahydrofurfuryl acrylate, or combinations thereof; and 
 a multifunctional acrylate monomer selected from dipropylene glycol diacrylate, 1, 4-butanediol diacrylate, 1, 3-butanediol diacrylate, or combinations thereof; and 
   a photoinitiator,
 wherein the semi-crystalline radiation curable oligomeric material is present from 20% to 30% by weight based on a total weight of the precursor composition, 
 wherein the acrylate monomer mixture is present from 70% to 80% by weight based on the total weight of the precursor composition, 
 wherein the photoinitiator is present from 0.5% to 2.5% by weight based on the total weight of the precursor composition, and 
 wherein the precursor composition has a viscosity within a range from 10 cP to 30 cP at 70 degrees Celsius. 
   
     
     
         19 . The precursor composition of  claim 18 , wherein the viscosity is within a range from 25 cP to 30 cP at 70 degrees Celsius. 
     
     
         20 . The precursor composition of  claim 18 , wherein the precursor composition comprises from 20 to 25% by weight of the semi-crystalline radiation curable oligomeric material and the precursor composition comprises from 75 to 80% by weight of the acrylate monomer mixture.