Electron Spectrometer and Analytical Method

Abstract

An electron spectrometer is provided which can collect spectra in a reduced measurement time. The electron spectrometer includes an electron analyzer for providing energy dispersion of electrons emitted from a sample (S), a detector having a plurality of detection elements juxtaposed and arranged in the direction of energy dispersion of the dispersed electrons, and a processor. The processor operates (i) to sweep a measurement energy in first incremental energy steps (ΔE 1 ) within the analyzer, to detect the dispersed electrons with the detection elements, and to obtain a plurality of resulting first spectra; (ii) to interpolate points of measurement in each of the first spectra; and (iii) to generate a spectral chart in second incremental energy steps (ΔE 2 ) smaller than the first incremental energy steps (ΔE 1 ) on the basis of the first spectra for which the points of measurement have been interpolated.

1 . An electron spectrometer comprising:
 an electron analyzer for providing energy dispersion of electrons emitted from a sample;   a detector having a plurality of detection elements juxtaposed and arranged in a direction of energy dispersion of the electrons which have been dispersed in energy by the analyzer; and
 a processor configured or programmed to: (i) sweep a measurement energy in first incremental energy steps within the analyzer, cause the electrons dispersed in energy by the analyzer to be detected by the plurality of detection elements, and obtain a plurality of resulting first spectra; (ii) interpolate points of measurement in each of the plurality of first spectra; and (iii) generate a spectral chart in second incremental energy steps smaller than the first incremental energy steps on the basis of the plurality of first spectra for which the points of measurement have been interpolated. 
   
     
     
         2 . The electron spectrometer as set forth in  claim 1 , wherein said processor generates said spectral chart by accumulating or averaging said plurality of first spectra for which the points of measurement have been interpolated. 
     
     
         3 . The electron spectrometer as set forth in  claim 1 , wherein said processor is further configured to programmed to accept a specified energy resolution and set said first incremental energy steps on the basis of the energy resolution. 
     
     
         4 . The electron spectrometer as set forth in  claim 3 , wherein said processor is further configured or programmed to set the ratio between the difference in measurement energy between any adjacent two of said detection elements and the magnitude of each of said first incremental energy steps on the basis of said energy resolution and to set the magnitude of each of the first incremental energy steps on the basis of the ratio. 
     
     
         5 . The electron spectrometer as set forth in  claim 4 , wherein said processor sets said ratio to a value smaller than unity. 
     
     
         6 . The electron spectrometer as set forth in  claim 1 , wherein said processor sets the magnitude of each of said first incremental energy steps such that the measurement energies for respective ones of said plurality of first spectra are not coincident. 
     
     
         7 . An analytical method using an electron spectrometer comprising both an electron analyzer for providing energy dispersion of electrons emitted from a sample and a detector provided with a plurality of detection elements that are juxtaposed and arranged in the direction of energy dispersion of the electrons dispersed in energy by the analyzer, said analytical method comprising:
 sweeping a measurement energy in first incremental energy steps within the analyzer so that electrons are dispersed in energy within the analyzer, detecting the dispersed electrons with the plurality of detection elements, and obtaining a plurality of resulting first spectra;   interpolating points of measurement in each of the plurality of first spectra; and   generating a spectral chart in second incremental energy steps smaller than the first incremental energy steps on the basis of the plurality of first spectra for which the points of measurement have been interpolated.