Distribution system for a process fluid and an electric current for a chemical and/or electrolytic surface treatment of a substrate

Abstract

The disclosure relates to a distribution system (1) for a process fluid (18) and an electric current for an electrolytic surface treatment of a substrate (9), comprising a distribution body (2), a primary cathode (30), and a secondary cathode (3), wherein the distribution body (2) comprises several openings (4) for the process fluid (18) and the electric current, wherein the several openings (4) are arranged at a front face (10) of the distribution body (2), wherein the front face (10) is directed to the primary cathode (30), wherein the primary cathode (30) and the secondary cathode (3) are arranged to attract the electric current and to guide the electric current to the substrate (9) to be treated, wherein the secondary cathode (3) comprises several cathode pixels (13), wherein the several cathode pixels (13) are distributed in an array to be aligned with at least an area of the substrate (9) to be treated, and wherein the several cathode pixels (13) are individually controllable for adjusting a distribution of the electric current at the substrate (9). The disclosure further relates to a distribution module (14) and a distribution method (100).

1 . A distribution system for a process fluid and an electric current for an electrolytic surface treatment of a substrate, comprising:
 a distribution body,   a primary cathode, and   a secondary cathode,   wherein the distribution body comprises several openings for the process fluid and the electric current, wherein the several openings are arranged at a front face of the distribution body, wherein the front face is directed to the primary cathode,   wherein the primary cathode and the secondary cathode are arranged to attract the electric current and to guide the electric current to the substrate ( 9 ) to be treated,   wherein the secondary cathode comprises several cathode pixels, wherein the several cathode pixels are distributed in an array to be aligned with at least an area of the substrate to be treated, and   wherein the several cathode pixels are individually controllable for adjusting a distribution of the electric current at the substrate.   
     
     
         2 . The distribution system according to  claim 1 , further comprising at least a power source configured to apply individual voltage potentials to the cathode pixels to individually control the cathode pixels. 
     
     
         3 . The distribution system according to  claim 1 , wherein at least some of the cathode pixels are each connected to a single power source. 
     
     
         4 . The distribution system according to  claim 3 , wherein at least some cathode pixels being controlled by the single power source. 
     
     
         5 . The distribution system according to  claim 2 , further comprising at least a processing unit configured to control the at least one power source to apply the individual voltage potentials to the cathode pixels for individual durations. 
     
     
         6 . The distribution system according to  claim 1 , wherein the control for adjusting the distribution of the electric current at the substrate is a physical arrangement of cathode pixels. 
     
     
         7 . The distribution system according to  claim 1 , wherein the cathode pixels are arranged at the distribution body. 
     
     
         8 . The distribution system according to  claim 1 , wherein the cathode pixels are arranged at the front face of the distribution body directed to the primary cathode. 
     
     
         9 . The distribution system according to  claim 1 , wherein the cathode pixels are arranged at a rear face of the distribution body, wherein the rear face is opposite to the front face of the distribution body. 
     
     
         10 . The distribution system according to  claim 9 , wherein the front face and the rear face of the distribution body are connected by connecting passages through the distribution body, and wherein the cathode pixels are arranged at least partially around the connecting passages. 
     
     
         11 . The distribution system according to  claim 1 , wherein the secondary cathode is separate to the distribution body and positioned adjacent to the distribution body in a direction towards the substrate. 
     
     
         12 . The distribution system according to  claim 1 , wherein the secondary cathode is arranged on an inert plate shield. 
     
     
         13 . The distribution system according to  claim 1 , wherein the inert plate shield is attachable to a substrate holder and movable with the substrate. 
     
     
         14 . A distribution module for a process fluid and an electric current for an electrolytic surface treatment of a substrate, comprising:
 a distribution system according to  claim 1 , and   a substrate holder,   wherein the substrate holder is configured to hold at least one substrate relative to the distribution body.   
     
     
         15 . A distribution method for a process fluid and an electric current for an electrolytic surface treatment of a substrate, comprising:
 providing a distribution body comprising several openings for the process fluid and the electric current, wherein the several openings are arranged at a front face of the distribution body,   arranging a primary cathode and a secondary cathode to attract and guide the electric current to the substrate to be treated, wherein the primary cathode is directed to the front face of the distribution body, and wherein the secondary cathode comprises several cathode pixels distributed in an array aligned with at least an area of the substrate to be treated, and   individually controlling the cathode pixels for adjusting a distribution of the electric current at the substrate.