Switch based on phase-change material

Abstract

The present description concerns a switch based on a phase-change material comprising: a region of the phase-change material; a heating element electrically insulated from the region of the phase-change material; and one or a plurality of pillars extending in the region of the phase-change material, the pillar(s) being made of a material having a thermal conductivity greater than that of the phase-change material.

1 . A device, comprising:
 a switch based on a phase-change material, comprising:
 first and second conduction electrodes; 
 a region of the phase-change material coupled between the first and second conduction electrodes of the switch; 
 a heating element electrically insulated from the region of the phase-change material; and 
 one or a plurality of islands of an electrically insulating material each having a first surface extending on top of and in contact with the first and second electrodes, wherein the region of the phase-change material extends on sides and on a second surface, opposite to the first surface, of each island. 
   
     
     
         2 . The device according to  claim 1 , wherein the sides of each island are substantially parallel to a conduction direction of the switch. 
     
     
         3 . The device according to  claim 1 , comprising a single island made of the electrically insulating material. 
     
     
         4 . The device according to  claim 1 , comprising a plurality of islands made of the electrically insulating material. 
     
     
         5 . The device according to  claim 4 , wherein the islands are distributed at regular intervals along the heating element. 
     
     
         6 . The device according to  claim 1 , wherein the electrically insulating material is aluminum nitride. 
     
     
         7 . The device according to  claim 1 , wherein an electrically insulating layer, interposed between the region of the phase-change material and the heating element, coats all the sides of each island. 
     
     
         8 . The device according to  claim 1 , wherein the region of the phase-change material coats all the sides of each island. 
     
     
         9 . The device according to  claim 8 , wherein an electrically insulating layer, interposed between the region of the phase-change material and the heating element, coats the upper surface and the sides of the region of the phase-change material. 
     
     
         10 . The device according to  claim 1 , wherein each island has a cross-section of trapezoidal shape. 
     
     
         11 . The device according to  claim 1 , wherein each island has a height equal to approximately 5 μm. 
     
     
         12 . The device according to  claim 1 , further comprising one or a plurality of pillars extending in the region of the phase-change material, the pillar(s) being made of a material having a thermal conductivity greater than that of the phase-change material. 
     
     
         13 . The device according to  claim 12 , wherein the material of the pillar(s) s electrically insulating. 
     
     
         14 . The device according to  claim 12 , wherein each pillar has a maximum lateral dimension equal to approximately 300 nm. 
     
     
         15 . A method, comprising:
 forming a switch with a phase-change material, the forming including:
 forming first and second conduction electrodes; 
 forming a region of the phase-change material coupled between the first and second conduction electrodes of the switch; 
 forming a heating element electrically insulated from the region of the phase-change material; and 
 forming one or a plurality of islands of an electrically insulating material each having a first surface extending on top of and in contact with the first and second electrodes, wherein the region of the phase-change material extends on sides and on a second surface, opposite to the first surface, of each island. 
   
     
     
         16 . The method of  claim 15 , comprising forming on top of an in contact with a portion of the upper surface of each control electrode. 
     
     
         17 . A device, comprising:
 a substrate;   a first electrode on the substrate;   a first insulating layer on the substrate;   a second electrode on the substrate, the first electrode being spaced from the second electrode by the first insulating layer;   a phase change material on the first electrode and on the second electrode, the phase change material being on the first insulating layer;   a first island on the first and second electrodes, the first electrode being between the first island and the substrate, the phase change material being on sides of the first island.   
     
     
         18 . The device of  claim 17 , wherein the phase change material is on a first surface of the first island, the first surface facing away from the substrate. 
     
     
         19 . The device of  claim 18 , comprising a second island spaced from the first island, the second island being on the first and second electrodes, the first electrode being between the second island and the substrate, the phase change material being on sides of the second island. 
     
     
         20 . The device of  claim 19 , wherein the phase change material is on a second surface of the second island, the second surface facing away from the substrate.