Surface modified substrates and related methods

Abstract

Surface modified substrates and related methods are provided. A substrate having a modified surface comprises a first region and a second region. The first region is located above the second region. The first region comprises an aluminum fluoride. The second region comprises an aluminum alloy. A concentration of the aluminum fluoride gradually decreases from the first region to the second region.

What is claimed is: 
     
         1 . A substrate comprising:
 a first region comprising an aluminum fluoride; and   a second region comprising an aluminum alloy,
 wherein the first region is above the second region; 
 wherein a concentration of the aluminum fluoride decreases from the first region to the second region. 
   
     
     
         2 . The substrate of  claim 1 , wherein the substrate has an aspect ratio of 2:1 to 2000:1, wherein the aspect ratio is a ratio of two of a width, a depth, a height, a length, or a diameter. 
     
     
         3 . The substrate of  claim 1 , wherein the substrate comprises:
 at least 50% by weight of aluminum based on a total weight of the substrate; and   less than 10% by weight of iron based on the total weight of the substrate.   
     
     
         4 . The substrate of  claim 1 , wherein the substrate comprises anodized Al. 
     
     
         5 . The substrate of  claim 1  wherein the substrate does not comprise magnesium. 
     
     
         6 . The substrate of  claim 1 , wherein the first region extends from a surface of the substrate to a depth of 2 nm to 5 μm. 
     
     
         7 . The substrate of  claim 1 , wherein the first region has a fluoride content of up to 100% as measured by XPS. 
     
     
         8 . The substrate of  claim 1 , wherein the first region has a fluorine content of 60% to 80% as measured by XPS. 
     
     
         9 . The substrate of  claim 5 , wherein the first region has a fluorine content of 20% to 40% as measured by XPS. 
     
     
         10 . The substrate of  claim 1 , wherein the first region is an outermost region of the substrate. 
     
     
         11 . A substrate comprising:
 a first region comprising a magnesium fluoride;   a second region comprising a magnesium-containing aluminum alloy; and   a third region comprising an aluminum fluoride;
 wherein the third region is between the first region and the second region; 
 wherein a concentration of the magnesium fluoride decreases from the first region to the third region; 
 wherein a concentration of the aluminum fluoride decreases from the third region to the second region. 
   
     
     
         12 . The substrate of  claim 11 , wherein the substrate has an aspect ratio of 2:1 to 2000:1, wherein the aspect ratio is a ratio of two of a width, a depth, a height, a length, or a diameter. 
     
     
         13 . The substrate of  claim 11 , wherein the substrate comprises:
 at least 50% by weight of aluminum based on a total weight of the substrate; and   less than 10% by weight of iron based on the total weight of the substrate.   
     
     
         14 . The substrate of  claim 11 , wherein the substrate comprises anodized Al. 
     
     
         15 . The substrate of  claim 11 , wherein:
 the first region has a magnesium content of 20% to 40% as measured by XPS;   the second region has a fluorine content of 10% to 60% as measured by XPS.   
     
     
         16 . A method comprising:
 exposing a substrate to a fluorine-containing vapor sufficient to form at least one of:
 a first region comprising at least one of an aluminum fluoride, a magnesium fluoride, or any combination thereof; 
 a second region comprising an aluminum alloy; and 
 a third region comprising at least one of an aluminum fluoride, a magnesium fluoride, or any combination thereof;
 wherein the first region is above the second region; 
 wherein the third region, when present, is between the first region and the second region. 
 
   
     
     
         17 . The method of  claim 16 , wherein a fluorine component from the fluorine-containing vapor reacts with a magnesium component of the substrate to form the first region. 
     
     
         18 . The method of  claim 16 , wherein a fluorine component from the fluorine-containing vapor reacts with an aluminum component of the substrate to form the first region. 
     
     
         19 . The method of  claim 16 , wherein the fluorine-containing vapor comprises at least one of CF 4 , C 2 F 4 , C 3 F 6 , C 4 F 8 , CHF 3 , C 2 H 2 F 2 , C 2 F 6 , HF, CH 3 F, a vaporized fluorinated polymer, or any combination thereof. 
     
     
         20 . The method of  claim 16 , wherein the exposing comprises heating at least a portion of the substrate at or to a temperature of 200° C. to 600° C. and exposing the substrate to the fluorine-containing vapor for a duration of 1 millisecond to 15 hours.