Inventor · disambiguated record
Carlo Waldfried
Also filed as: WALDFRIED CARLO
33 granted patents·36 pending applications·2,646 citations·filing 1998–2025
97Inventor score
Top patents by PatentIndex Score
69 records- 0198US6756085B2Ultraviolet curing processes for advanced low-k materialsAXCELIS TECH INC·Filed 2003·Granted Jun 29, 2004·685 cites·58 claims
- 0298US6558755B2Plasma curing process for porous silica thin filmDOW CORNING·Filed 2001·Granted May 6, 2003·563 cites·13 claims
- 0395US6913796B2Plasma curing process for porous low-k materialsDOW CORNING·Filed 2001·Granted Jul 5, 2005·527 cites·34 claims
- 0495US6759098B2Plasma curing of MSQ-based porous low-k film materialsAXCELIS TECH INC·Filed 2001·Granted Jul 6, 2004·580 cites·19 claims
- 0594US7629272B2Ultraviolet assisted porogen removal and/or curing processes for forming porous low k dielectricsAXCELIS TECH INC·Filed 2005·Granted Dec 8, 2009·26 cites·16 claims
- 0692US6548416B2Plasma ashing processAXCELIS TECHNOLGOIES INC·Filed 2001·Granted Apr 15, 2003·93 cites·4 claims
- 0789US6630406B2Plasma ashing processAXCELIS TECHNOLOGIES·Filed 2001·Granted Oct 7, 2003·50 cites·45 claims
- 0886US7709814B2Apparatus and process for treating dielectric materialsAXCELIS TECH INC·Filed 2005·Granted May 4, 2010·12 cites·47 claims
- 0985US6951823B2Plasma ashing processAXCELIS TECH INC·Filed 2003·Granted Oct 4, 2005·35 cites·40 claims
- 1084US10497598B2Electrostatic chuck and method of making sameENTEGRIS INC·Filed 2015·Granted Dec 3, 2019·4 cites·64 claims
- 1182US2024337023A1Articles coated with a fluoro-annealed filmENTEGRIS INC·Filed 2024·Application pending·0 cites
- 1282US2024239047A1Additive manufactured articles having coated surfaces and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 1379US11713504B2Chemical resistant multi-layer coatings applied by atomic layer depositionENTEGRIS INC·Filed 2022·Granted Aug 1, 2023·0 cites·10 claims
- 1479US6834656B2Plasma process for removing polymer and residues from substratesAXCELIS TECHNOLOGY INC·Filed 2001·Granted Dec 28, 2004·30 cites·21 claims
- 1576US12392040B2Metal body having magnesium fluoride region formed therefromENTEGRIS INC·Filed 2020·Granted Aug 19, 2025·0 cites·12 claims
- 1676US2024344195A1Coatings that contain fluorinated yttrium oxide and a metal oxide, and methods of preparing and using the coatingsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 1776US2025129485A1Coatings for enhancement of properties and performance of substrate articles and apparatusHENDRIX BRYAN C·Filed 2024·Application pending·0 cites
- 1876US2023097687A1Additive manufactured articles having coated surfaces and related methodsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 1974US8580076B2Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewithBECKNELL ALAN FREDERICK·Filed 2003·Granted Nov 12, 2013·15 cites·37 claims
- 2074US7704872B2Ultraviolet assisted pore sealing of porous low k dielectric filmsAXCELIS TECH INC·Filed 2007·Granted Apr 27, 2010·1 cites·9 claims
- 2173US11390943B2Chemical resistant multi-layer coatings applied by atomic layer depositionENTEGRIS INC·Filed 2018·Granted Jul 19, 2022·0 cites·18 claims
- 2273US2025223705A1Metal body having magnesium fluoride region formed therefromENTEGRIS INC·Filed 2025·Application pending·0 cites
- 2372US12084778B2Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2020·Granted Sep 10, 2024·0 cites·10 claims
- 2471US12101920B2Conductive polymeric layers for charge dissipationENTEGRIS INC·Filed 2023·Granted Sep 24, 2024·0 cites·17 claims
- 2568US7678682B2Ultraviolet assisted pore sealing of porous low k dielectric filmsAXCELIS TECH INC·Filed 2004·Granted Mar 16, 2010·7 cites·20 claims
- 2667US2023287564A1Devices and method for delivering molybdenum vaporENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2766US10882774B2Coatings for glass-shaping molds and molds comprising the sameENTEGRIS INC·Filed 2018·Granted Jan 5, 2021·0 cites·10 claims
- 2866US2023386795A1Surface coating for chamber components used in plasma systemsENTEGRIS INC·Filed 2023·Application pending·0 cites
- 2966US2018044800A1Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2016·Application pending·0 cites
- 3064US2022010426A1Coatings that contain fluorinated yttrium oxide and a metal oxide, and methods of preparing and using the coatingsENTEGRIS INC·Filed 2021·Application pending·0 cites
- 3164US2018202047A1Articles coated with a fluoro-annealed filmENTEGRIS INC·Filed 2018·Application pending·0 cites
- 3262US12018382B2Coatings for enhancement of properties and performance of substrate articles and apparatusENTEGRIS INC·Filed 2018·Granted Jun 25, 2024·0 cites·3 claims
- 3362US11772127B2Methods for applying a blanket polymer coating to a substrateENTEGRIS INC·Filed 2022·Granted Oct 3, 2023·0 cites·19 claims
- 3462US2025305122A1Coated conduits, related systems and related methodsENTEGRIS INC·Filed 2025·Application pending·0 cites
- 3562US2024387225A1Electrostatic chucks and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3662US2025003072A1High purity molybdenum-containing precursors and related systems and methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 3762US2023100791A1Articles having removable coatings and related methodsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 3862US2023416913A1Modules for delivery systems and related methodsENTEGRIS INC·Filed 2023·Application pending·0 cites
- 3961US12444636B2Electrostatic chuck with a charge dissipation structureENTEGRIS INC·Filed 2023·Granted Oct 14, 2025·0 cites·19 claims
- 4060US2025034694A1Surface modified substrates and related methodsENTEGRIS INC·Filed 2024·Application pending·0 cites
- 4158US7011868B2Fluorine-free plasma curing process for porous low-k materialsAXCELIS TECH INC·Filed 2003·Granted Mar 14, 2006·6 cites·21 claims
- 4255US12322634B2Electrostatic chuck prepared by additive manufacturing, and related methods and structuresENTEGRIS INC·Filed 2021·Granted Jun 3, 2025·0 cites·19 claims
- 4355US11764037B2Surface coating for chamber components used in plasma systemsENTEGRIS INC·Filed 2014·Granted Sep 19, 2023·0 cites·20 claims
- 4455US2023093910A1Additive manufactured articles having passivated surfaces and related methodsENTEGRIS INC·Filed 2022·Application pending·0 cites
- 4555US2011136346A1Substantially Non-Oxidizing Plasma Treatment Devices and ProcessesAXCELIS TECH INC·Filed 2009·Application pending·0 cites
- 4654US12270104B2Substrate with fluorinated yttrium coatings, and methods of preparing and using the substratesENTEGRIS INC·Filed 2022·Granted Apr 8, 2025·0 cites·15 claims
- 4753US2014076353A1Plasma mediated ashing processesLAM RES CORP·Filed 2013·Application pending·0 cites
- 4852US7078161B2Plasma ashing process for removing photoresist and residues during ferroelectric device fabricationINTEL CORP·Filed 2003·Granted Jul 18, 2006·3 cites·22 claims
- 4951US2009277871A1Plasma mediated ashing processes that include formation of a protective layer before and/or during the plasma mediated ashing processAXCELIS TECH INC·Filed 2009·Application pending·0 cites
- 5050US12031212B2Yttrium fluoride films and methods of preparing and using yttrium fluoride filmsENTEGRIS INC·Filed 2021·Granted Jul 9, 2024·0 cites·6 claims
Showing the top 50 of 69 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →