US2025051899A1PendingUtilityA1

Yttrium fluoride sprayed coating, spray material therefor, and corrosion resistant coating including sprayed coating

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Assignee: SHINETSU CHEMICAL COPriority: Apr 12, 2016Filed: Oct 24, 2024Published: Feb 13, 2025
Est. expiryApr 12, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Noriaki HamayaYasushi Takai
C23C 28/04C23C 4/134C23C 28/042C23C 4/04C23C 4/126C23C 4/02C23C 4/11C23C 4/06
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Claims

Abstract

The corrosion resistant coating has a multilayer structure comprising a lower layer in the form of a rare earth oxide sprayed coating having a thickness of 10 to 500 μm and a porosity of up to 5% and an outermost surface layer in the form of an yttrium fluoride sprayed coating.

Claims

exact text as granted — not AI-modified
1 . A corrosion resistant coating having a multilayer structure comprising a lower layer in the form of a rare earth oxide sprayed coating having a thickness of 10 to 500 μm and a porosity of up to 5% and an outermost surface layer in the form of an yttrium fluoride sprayed coating. 
     
     
         2 . The corrosion resistant coating of  claim 1 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV. 
     
     
         3 . The corrosion resistant coating of  claim 2 , wherein the yttrium fluoride sprayed coating has a crack amount of up to 5% based on the surface area of the coating. 
     
     
         4 . The corrosion resistant coating of  claim 2 , wherein the yttrium fluoride sprayed coating has a porosity of up to 5% based on the surface area of the coating. 
     
     
         5 . The corrosion resistant coating of  claim 2 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7  and YOF. 
     
     
         6 . The corrosion resistant coating of  claim 2 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3 , Y 2 O 3 , and at least one compound selected from the group consisting of Y 5 O 4 F 7  and YOF. 
     
     
         7 . The corrosion resistant coating of  claim 1 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV. 
     
     
         8 . The corrosion resistant coating of  claim 7 , wherein the yttrium fluoride sprayed coating has a crack amount of up to 5% based on the surface area of the coating. 
     
     
         9 . The corrosion resistant coating of  claim 7 , wherein the yttrium fluoride sprayed coating has a porosity of up to 5% based on the surface area of the coating. 
     
     
         10 . The corrosion resistant coating of  claim 7 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7  and YOF. 
     
     
         11 . The corrosion resistant coating of  claim 7 , wherein the yttrium fluoride sprayed coating has an yttrium fluoride crystal structure composed of YF 3 , Y 2 O 3 , and at least one compound selected from the group consisting of Y 5 O 4 F 7  and YOF. 
     
     
         12 . An yttrium fluoride spray material for forming an yttrium fluoride sprayed coating, which is a powder mixture consisting essentially of 95 to 85% by weight of a granulated powder of yttrium fluoride and 5 to 15% by weight of a granulated powder of yttrium oxide. 
     
     
         13 . The yttrium fluoride spray material of  claim 12  for forming an yttrium fluoride sprayed coating having an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV. 
     
     
         14 . The yttrium fluoride spray material of  claim 12  for forming an yttrium fluoride sprayed coating having an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV. 
     
     
         15 . An yttrium fluoride spray material for forming the yttrium fluoride sprayed coating, in the form of a granulated powder consisting essentially of 9 to 27% by weight of Y 5 O 4 F 7  and the balance of YF 3 . 
     
     
         16 . The yttrium fluoride spray material of  claim 15  for forming an yttrium fluoride sprayed coating having an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV. 
     
     
         17 . The yttrium fluoride spray material of  claim 15  for forming an yttrium fluoride sprayed coating having an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV. 
     
     
         18 . A method of forming an yttrium fluoride sprayed coating having
 an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV, or   an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV,   by thermal spraying the yttrium fluoride spray material of  claim 12 .   
     
     
         19 . A method of forming an yttrium fluoride sprayed coating having
 an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 4.8% by weight, and a hardness of at least 350 HV, or   an yttrium fluoride crystal structure composed of YF 3  and at least one compound selected from the group consisting of Y 5 O 4 F 7 , YOF and Y 2 O 3 , a thickness of 10 to 500 μm, an oxygen concentration of 1 to 6% by weight, a carbon content of up to 0.005% by weight, and a hardness of at least 350 HV,   by thermal spraying the yttrium fluoride spray material of  claim 15 .

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