Substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate

Abstract

The disclosure relates to a substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate, a substrate handling system comprising a substrate holder and an immersion scanner unit and a use of a substrate holder for holding a substrate with a width in a range of 1000 to 3500 mm and a length in a range of 1000 to 4000 mm. The substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate comprises a substrate carrier and a power contact unit. The substrate carrier comprises a frame to carry the substrate. The power contact unit comprises a body, a plurality of main legs extending from the body at least partially along an edge of the substrate carrier and a plurality of side legs each arranged essentially perpendicular at one of the main legs to contact the substrate. The power contact unit further comprises a plurality of retaining elements provided between the body of the power contact unit and the frame of the substrate carrier to keep the substrate in contact with the power contact unit when the substrate is placed onto the substrate carrier.

1 . A substrate holder for holding a substrate in a chemical and/or electrolytic surface treatment of the substrate, comprising:
 a substrate carrier, and   a power contact unit,   wherein the substrate carrier comprises a frame to carry the substrate,   wherein the power contact unit comprises a body, a plurality of main legs extending from the body at least partially along an edge of the substrate carrier and a plurality of side legs each arranged essentially perpendicular at one of the main legs to contact the substrate, and wherein the power contact unit further comprises a plurality of retaining elements provided between the body of the power contact unit and the frame of the substrate carrier to keep the substrate in contact with the power contact unit when the substrate is placed onto the substrate carrier.   
     
     
         2 . The substrate holder according to  claim 1 , wherein the retaining elements on opposite sides of the substrate are configured to apply different pressure on the frame. 
     
     
         3 . The substrate holder according to  claim 1 , wherein the retaining elements comprise spring elements, pneumatic elements, electric elements, magnetic elements and/or suction elements. 
     
     
         4 . The substrate holder according to  claim 1 , further comprising several electric contact portions arranged at the side legs to supply electric current to the substrate. 
     
     
         5 . The substrate holder according to  claim 1 , wherein the power contact unit further comprises electrically conducting lines extending along the main legs and to the electric contact portions in the side legs. 
     
     
         6 . The substrate holder according to  claim 1 , wherein the main legs, the side legs, the electric contact portions and/or the retaining elements are arranged along two opposite edges or along all four edges of the substrate carrier. 
     
     
         7 . The substrate holder according to  claim 4 , wherein the electric contact portions are dry power contacts, wet power contacts and/or contact arms. 
     
     
         8 . The substrate holder according to  claim 1 , wherein the substrate carrier comprises a vacuum unit configured to provide suction between the frame of the substrate carrier and the substrate. 
     
     
         9 . The substrate holder according to  claim 1 , wherein the power contact unit further comprises vacuum lines extending along the main legs to suction areas arranged at the side legs to hold the substrate. 
     
     
         10 . The substrate holder according to  claim 1 , wherein the substrate carrier is configured to hold the substrate only at its edges and/or corners for a double side chemical and/or electrolytic surface treatment of two sides of the substrate. 
     
     
         11 . The substrate holder according to  claim 1 , wherein the substrate carrier is configured to carry two substrates on opposite sides of the substrate carrier. 
     
     
         12 . The substrate holder according to  claim 1 , wherein the substrate carrier is grid-shaped. 
     
     
         13 . A substrate handling system comprising the substrate holder according to  claim 1  and an immersion scanner unit, wherein the substrate holder is configured to hold the substrate relative to the immersion scanner unit. 
     
     
         14 . The substrate handling system according to  claim 13 , further comprising an agitation unit configured to move the substrate or the immersion scanner unit relative to each other, preferably in up to three dimensions. 
     
     
         15 . A use of the substrate holder according to  claim 1  for holding a substrate with a width in a range of 1000 to 3500 mm and a length in a range of 1000 to 4000 mm, preferably a width in a range of 1500 to 3000 mm and a length in a range of 1500 to 3500 mm.