System for a chemical and/or electrolytic surface treatment of a substrate

Abstract

The disclosure relates to a system for a chemical and/or electrolytic surface treatment of a substrate comprises a catholyte chamber, an anolyte chamber, a distribution body, and a catholyte outlet. The distribution body is arranged in the catholyte chamber and the catholyte chamber is separated from the anolyte chamber by means of a membrane, wherein the membrane is tilted relative to the distribution body. The distribution body comprises jet openings for distributing a catholyte onto the substrate to be treated and drain openings for draining the catholyte out of a reaction space between the distribution body and the substrate. The catholyte outlet is arranged at the catholyte chamber in an eccentric position.

1 . A system for a chemical and/or electrolytic surface treatment of a substrate, comprising:
 a catholyte chamber,   an anolyte chamber,   a distribution body, and   a catholyte outlet,   
       wherein the distribution body is arranged in the catholyte chamber, wherein the catholyte chamber is separated from the anolyte chamber by means of a membrane, 
       wherein the membrane is tilted relative to the distribution body, wherein the distribution body comprises jet openings for distributing a catholyte onto the substrate to be treated and drain openings for draining the catholyte out of a reaction space between the distribution body and the substrate, and 
       wherein the catholyte outlet is arranged at the catholyte chamber in an eccentric position. 
     
     
         2 . The system according to  claim 1 , wherein the catholyte chamber has a lateral side, which extends essentially perpendicular to a longitudinal direction of the distribution body, and wherein the catholyte outlet is arranged in the lateral side of the catholyte chamber. 
     
     
         3 . The system according to  claim 1 , wherein the catholyte chamber, in a cross section, has a wedge shape. 
     
     
         4 . The system according to  claim 2 , wherein the wedge shaped catholyte chamber has, in a cross section, a longer lateral side and a shorter lateral side, and wherein the catholyte outlet is arranged in the longer lateral side of the catholyte chamber. 
     
     
         5 . The system according to  claim 1 , wherein the catholyte outlet is arranged at the catholyte chamber in a non-rotation symmetric position. 
     
     
         6 . The system according to  claim 1 , wherein the catholyte chamber comprises a drain ring arranged around the distribution body for draining the catholyte out of the reaction space between the distribution body and the substrate. 
     
     
         7 . The system according to  claim 1 ,
 wherein the drain openings and/or the drain ring are configured to drain the catholyte essentially perpendicular to a substrate's surface to be treated, and/or   wherein the drain ring is configured as an open overflow for catholyte out of the reaction space and/or as a vent for bubbles generated or transported in the reaction space, and in particular, wherein the system comprises a rotating substrate holder.   
     
     
         8 . The system according to  claim 1 , wherein the jet openings are configured to distribute the catholyte essentially perpendicular onto the substrate to be treated. 
     
     
         9 . The system according to  claim 1 , wherein the drain openings extend from a substrate facing surface of the distribution body to a back surface of the distribution body, which is opposite to the substrate facing surface. 
     
     
         10 . The system according to  claim 1 , wherein the jet openings extend from the substrate facing surface of the distribution body only partially into the distribution body and lead to a catholyte inlet arranged at a lateral side of the distribution body . 
     
     
         11 . The system according to  claim 1 , wherein the catholyte chamber comprises a protective gas system to provide a protective gas curtain between the catholyte and the surrounding atmosphere. 
     
     
         12 . The system according to  claim 1 , further comprising a catholyte circulation system for circulating the catholyte in the catholyte chamber and an anolyte circulation system for circulating the anolyte in the anolyte chamber, wherein the catholyte circulation system is separate from the anolyte circulation system, in particular,
 wherein the catholyte circulation system is configured to circulate the catholyte in such a manner as to promote bubble separation in a catholyte tank and/or the anolyte circulation system is configured to circulate the anolyte in such a manner as to promote bubble separation in an anolyte tank, and/or   wherein the system comprises a first bubble separator upstream an/the anolyte storage tank and/or a second bubble separator upstream a/the catholyte storage tank.   
     
     
         13 . The system according to  claim 1 ,
 wherein the membrane is tilted so as to merge and/or remove bubbles generated at the anode, and/or   wherein the membrane is permeable for electric current and metallic ions.   
     
     
         14 . The system according to  claim 1 , wherein the anolyte chamber comprises at least one inner anolyte inlet, at least one outer anolyte inlet and at least one anolyte outlet, which are selectable to adjust an anolyte flow to different substrate dimensions, in particular, wherein the anolyte outlet is configured to allow for removal of gas bubbles generated at the anode, in particular, by means of a/the anolyte circulation system. 
     
     
         15 . The system according to  claim 1 ,
 wherein the system has a height in a range of 50 to 350 mm, particularly, wherein the system has a height in a range of 200 mm to 350 mm, particularly 230 mm to 260 mm, or in a range of 50 mm to 200 mm, more particularly 80 mm to 120 mm.