Fluorine resistant compositions

Abstract

The present disclosure generally provides a fluorine resistant ceramic composition. The fluorine resistant ceramic composition includes about 80 mol % to about 99.9 mol % of a first metal composition including an aluminum based composition selected from the group consisting of a nitride, oxynitride, oxide, and oxy-fluoride. The fluorine resistant ceramic composition includes about 0.1 mol % to about 20 mol % of a second metal composition including an alkaline-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride.

What is claimed is: 
     
         1 . A fluorine resistant ceramic composition comprising:
 about 80 mol % to about 99.9 mol % of a first metal composition comprising an aluminum based composition selected from the group consisting of a nitride, oxynitride, oxide, and oxy-fluoride; and   about 0.1 mol % to about 20 mol % of a second metal composition comprising an alkaline-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride.   
     
     
         2 . The composition of  claim 1 , further comprising a third metal composition comprising a Group 3-12 metal composition. 
     
     
         3 . The composition of  claim 2 , wherein the Group 3-12 metal composition comprises a rare earth metal comprising one or more of erbium, lanthanum, or samarium. 
     
     
         4 . The composition of  claim 2 , wherein the Group 3-12 metal composition comprises a transition metal comprising one or more of yttrium or scandium. 
     
     
         5 . The composition of  claim 2 , wherein the composition comprises:
 about 80 mol % to about 99.8 mol % of the first metal composition;   about 0.1 mol % to about 19.9 mol % of the second metal composition; and   about 0.1 mol % to about to about 19.9 mol % of the third metal composition,   wherein the combination of the first metal composition, second metal composition, and third metal composition does not exceed 100 mol %.   
     
     
         6 . The composition of  claim 5 , wherein:
 the first metal composition is aluminum oxide;   the second metal composition is selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide; and   the third metal composition is selected from the group consisting of yttrium oxide, erbium oxide, lanthanum oxide, samarium oxide, and scandium oxide.   
     
     
         7 . The composition of  claim 6 , wherein:
 The first metal composition is aluminum oxide;   The second metal composition is magnesium oxide; and   The third metal composition is yttrium oxide.   
     
     
         8 . The composition of  claim 2 , wherein at least one of the first metal composition, second metal composition, or third metal composition comprises one or more of an oxyfluoride or fluoride. 
     
     
         9 . A fluorine resistant ceramic composition comprising:
 about 0.1 mol % to about 40% mol % of a first metal composition comprising an aluminum based composition selected from the group consisting of a nitride, oxynitride, oxide, and oxy-fluoride;   about 55 mol % to about 99.9 mol % of a second metal composition comprising an alkaline-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride; and   about 0 mol % to about 40 mol % of a third metal composition comprising a rare-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride;   wherein the composition comprises about 0.1 mol % to about 40 mol % of the third metal composition when the composition comprises about 15 mol % to about 40 mol % of the first metal composition, and wherein the combination of the first metal composition, second metal composition, and third metal composition does not exceed 100 mol %.   
     
     
         10 . The composition of  claim 9 , wherein the third metal composition comprises a Group 3-12 metal composition. 
     
     
         11 . The composition of  claim 10 , wherein the Group 3-12 metal composition comprises a rare-earth metal comprising one or more of erbium, lanthanum, or samarium. 
     
     
         12 . The composition of  claim 10 , wherein the Group 3-12 metal composition comprises a transition metal comprising one or more of yttrium or scandium. 
     
     
         13 . The composition of  claim 10 , wherein the composition comprises:
 about 15 mol % to about 40 mol % of the first metal composition;   about 55 mol % to about 84.9 mol % of the second metal composition; and   about 0.1 mol % to about to about 30 mol % of the third metal composition, wherein the combination of the first metal composition, second metal composition, and third metal composition does not exceed 100 mol %.   
     
     
         14 . The composition of  claim 10 , wherein:
 the first metal composition is aluminum oxide;   the second metal composition is selected from the group consisting of magnesium oxide, calcium oxide, strontium oxide, and barium oxide; and   the third metal composition is selected from the group consisting of yttrium oxide, erbium oxide, lanthanum oxide, samarium oxide, and scandium oxide.   
     
     
         15 . The composition of  claim 14 , wherein:
 the first metal composition is aluminum oxide;   the second metal composition is magnesium oxide; and   the third metal composition is yttrium oxide.   
     
     
         16 . The composition of  claim 10 , wherein at least one of the first metal composition, second metal composition, or third metal composition comprises an oxyfluoride or fluoride. 
     
     
         17 . A ceramic component, the ceramic component comprising a ceramic composition comprising:
 about 0.1 mol % to about 40 mol % of a first metal composition comprising an aluminum based composition selected from the group consisting of a nitride, oxynitride, oxide, and oxy-fluoride;   about 55 mol % to about 99.9 mol % of a second metal composition comprising an alkaline-earth metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride; and   about 0 mol % to about 40 mol % of a third metal composition comprising an alkali metal based composition selected from the group consisting of a nitride, oxynitride, oxide, oxy-fluoride, and fluoride;   wherein the composition comprises about 0.1 mol % to about 40 mol % of the third metal composition when the composition comprises about 15 mol % to about 40 mol % of the first metal composition, and wherein the combination of the first metal composition, second metal composition, and third metal composition does not exceed 100 mol %.   
     
     
         18 . The ceramic component of  claim 17 , wherein the ceramic component comprises a lift pin, a ring, an isolator, a heater, an electrostatic chuck, a baffle, a nozzle, a lid, a cover wafer, or other. 
     
     
         19 . The ceramic component of  claim 18 , wherein the ceramic component comprises the heater. 
     
     
         20 . The ceramic component of  claim 19 , wherein the ceramic component comprises the electrostatic chuck.