Ferromagnetic film

Abstract

Disclosed is a ferromagnetic film consisting of an alloy represented by a formula Co x Fe y T z , where T is an element selected from the group consisting of Ta, Ti, Zr, Hf, Mo, and W, and x, y, and z represent atomic % and satisfy 73<x<94, 5<y<15, 1<z<12, and x+y+z=100. This ferromagnetic film has high saturation magnetic flux density, and soft magnetism not to be degraded by high-temperature annealing, and which is suitably applied to a magnetic head.

What is claimed is: 
     
       1. A magnetic head comprising a ferromagnetic film having a coercive force of 200 A/m or less and consisting of an alloy represented by the formula:   Co.sub.x Fe.sub.y T.sub.z     wherein T is an element selected from the group consisting of Ta, Ti, Zr, Hf, Mo and W, and x, y, and z represent atomic % and satisfy: 73<x<94,   5<y≦15,   1<z <12, and   x+y+z=100,     and wherein said film shows hcp-phase (001) orientation.   
     
     
       2. The magnetic head according to claim 1, wherein said ferromagnetic film has been subjected to heat treatment at 650° C. or less. 
     
     
       3. The magnetic head according to claim 1, wherein said ferromagnetic film has 11° or less of the full width at half maximum of a main peak in a x-ray diffraction curve. 
     
     
       4. The magnetic head according to claim 1, wherein y satisfies 7.5≦y≦15 at %. 
     
     
       5. The magnetic head according to claim 1, wherein T is selected from the group consisting of Ti, Mo, Zr, Hf and W, and z is from 3 to 8 at %. 
     
     
       6. The magnetic head according to claim 1, wherein T is Ta and z is from 6.5 to 9 at %. 
     
     
       7. A magnetic device comprising, a substrate, and   a ferromagnetic film formed on said substrate, and having a coercive force Hc of 200 A/m or less and consisting of an alloy represented by the formula:   Co.sub.x Fe.sub.y T.sub.z        wherein T is an element selected from the group consisting of Ta, Ti, Zr, Hf, Mo and W, and x, y, and z represent atomic % and satisfy: 73<x<94,   5<y≦15,   1<z<12, and   x+y+z=100,     and wherein said film shows hcp-phase (001) orientation.   
     
     
       8. ferromagnetic film having a coercive force 200 A/m or less and consisting of an alloy represented by the formula:   Co.sub.x Fe.sub.y Ta.sub.z     wherein x, y, and z represent atomic % and satisfy: 73<x<94,   5≦y≦15,   6.5<z<9, and   x+y+z=100,     and wherein said film shows hcp-phase (001) orientation.   
     
     
       9. A magnetic head comprising a ferromagnetic film having a coercive force of 200 A/m or less and consisting of an alloy represented by the formula:   Co.sub.x Fe.sub.y T.sub.z     wherein T is an element selected from the group consisting of Ta, Ti, Zr, Hf, Mo and W, and x, y, and z represent atomic % and satisfy: 73<x<94,   5<y≦15,   1<z<12, and   x+y+z=100.