CdTe crystal or CdZnTe crystal and method for preparing the same
Abstract
An object of the present invention is to reduce the etch pit density (EPD) and the full-width-half-maximum (FWHM) value of the double crystal X-ray rocking curve, and to provide a CdTe crystal or a CdZnTe crystal which does not include deposits having Cd or Te and the process for producing the same. After a CdTe crystal or a CdZnTe crystal was grown, while the temperature of the crystal is from 700 to 1050° C., the Cd pressure is adjusted so as to keep the stoichiometry of the crystal at the above temperature. The crystal is left for time t which is determined so that each of a diameter L(r) of the crystal and a length L(z) thereof satisfies the following equation 1:Then, when the crystal is cooled, the temperature of the crystal is decreased within a range in which the temperature of the crystal and that of a Cd reservoir satisfy the following equation 2:
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1. A CdTe crystal or a CdZnTe crystal, wherein deposits comprising Te or Cd are not observable by an IR microscope, an etch pit density (EPD) of the crystal is not more than 3×10 4 cm −2 , and a full-width-half-maximum (FWHM) of a double crystal X-ray rocking curve of the crystal is not more than 20s.
2. A CdTe crystal or a CdZnTe crystal as claimed in claim 1 , wherein the crystal is an n-type CdTe crystal or an n-type CdZnTe crystal.
3. A CdTe crystal or a CdZnTe crystal as claimed in claim 1 , wherein the crystal is a p-type CdTe crystal or a p-type CdZnTe crystal.
4. A process for producing a CdTe crystal or a CdZnTe crystal as claimed in claim 1 , comprising the steps of
growing a CdTe crystal or a CdZnTe crystal,
maintaining a temperature of the grown crystal from 700 to 1050° C.,
adjusting a Cd pressure so as to maintain a stoichiometry of the crystal at said temperature,
maintaining the crystal for time t which is determined so that each of a diameter L(r) of the crystal and a length L(z) of the crystal satisfies the equation
{L ( r ), L ( z ))}/2<{4exp(−1.15 /kT )× t}{fraction ( 1 / 2 )}
wherein k is Boltzmann's constant, T is an absolute temperature, t is time (in seconds), and {4exp(−1.15/kT)×t} ½ is a chemical diffusion distance (in centimeters), and
cooling the remaining crystal so that the temperature of the crystal is decreased within a range in which the temperature of the crystal and that of a Cd reservoir satisfy the equation
−288+1.68× T Cd <T CdTe <402+0.76× T Cd
where T CdTe is the temperature of the crystal and T Cd is the temperature of the Cd reservoir.
5. A process for producing a CdTe crystal or a CdZnTe crystal as claimed in claim 4 , wherein the step of growing the CdTe crystal or the CdZnTe crystal is carried out by a vapor pressure (Cd pressure) control method, a VGF method, or an HB method.Cited by (0)
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