Holding apparatus

Abstract

A device holding apparatus comprising a base plate; a hollow pad guard provided on the base plate; a pad pin inserted to the pad guard movably in an axis direction and having a through hole; a pad provided at a tip of the pad pin and having a through hole connected to the through hole of the pad pin; and a bellows pad provided on the base plate, having a through hole connected to the through hole of the pad pin and being elastic in the axis direction; for holding by suction a device by the pad by applying a negative pressure to the through hole of the bellows pad, the through hole of the pad pin and the through hole of the pad.

What is claimed is:  
     
       1. A device holding apparatus, comprising: 
       a base plate comprised of a conductive material;  
       a hollow pad guard provided on said base plate;  
       a pad pin comprise of a conductive material and inserted to said pad guard movable in an axis direction and having a through hole;  
       a pad comprised of conductive material and provided at a tip of said pad pin and having a through hole connected to the through hole of the pad pin; and  
       an elastic body provided between said base plate and said pad pin for giving to said pad pin a force in its tip direction; and  
       a sealing body for forming an airtight chamber on a base end side of said pad pin;  
       for holding by suction a device by said pad by applying a negative pressure to said airtight chamber, the through hole of said pad pin and the t rough hole of said pad.  
     
     
       2. The device holding apparatus as set forth in  claim 1  wherein a tip of said p d is more protruding than a tip of said pad guard when said negative pressure is not applied. 
     
     
       3. The device holding apparatus as set forth in  claim 1 , wherein said pad guard is comprised of a conductive material and said device contacts the tip of said pad guard when said negative pressure is applied. 
     
     
       4. The device holding apparatus as set forth in  claim 2 , wherein said pad guard is comprised of a conductive material and said device contacts the tip of said pad guard when said negative pressure is applied. 
     
     
       5. The device holding apparatus as set forth in  claim 1 , wherein said pad pin comprises a rotation stop mechanism. 
     
     
       6. The device holding apparatus as set forth in  claim 2 , wherein said pad pin comprises a rotation stop mechanism. 
     
     
       7. The device holding apparatus as set forth in  claim 3 , wherein said pad pin comprises a rotation stop mechanism. 
     
     
       8. The device holding apparatus as set forth in  claim 4 , wherein said pad pin comprises a rotation stop mechanism.