Apparatus and method for adhering a flexible film to a ventilated platen without air entrapment

Abstract

An apparatus and a method for adhering a flexible film to a ventilated platen without air entrapment problems are described. In the apparatus, a tool body and a tool lid are connected together by a hinge means in a clam-shell configuration. The tool body has a cavity formed such that a ventilated platen can be tightly positioned therein with a top surface of the platen exposed. A flexible film is mounted to an inner surface of the tool lid facing the tool body and pushed down onto the ventilated platen while air is being withdrawn from the ventilated platen. The adhesion process for the flexible film to the platen can be completed without any air entrapment problem existing between the film and the platen.

What is claimed is:  
     
       1. An apparatus for adhering a flexible film to a ventilated platen without air entrapment comprising: 
       a tool body having a cavity therein defined by a contiguous sidewall having a planar top surface and a bottom wall having at least one aperture, said cavity being adapted for receiving said ventilated platen and for exposing a top surface of said platen;  
       a tool lid having a shape substantially similar to a planar area of said tool body, said tool lid having an inner surface for mounting said flexible film thereon and a sealing means mounted on said inner surface along a peripheral edge of said lid; and  
       a hinge means connecting an edge of said tool body to an edge of said tool lid for sealingly engaging the two parts together in a clam-shell configuration with said sealing means on said tool lid engaging said planar top surface of said contiguous sidewall of the tool body and with a vacuum pulled from said at least one aperture in said bottom wall of the tool body such that said flexible film is transferred to and adheres on said top surface of the ventilated platen by an adhesive layer pre-deposited on said flexible film.  
     
     
       2. An apparatus for adhering a flexible tutu to a ventilated platen without air entrapment according to  claim 1 , wherein said tool body and said tool lid both have a circular shape. 
     
     
       3. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to  claim 1 , wherein said ventilated platen being a chamber lid for a plasma process chamber and said flexible film being an arc-resistant film. 
     
     
       4. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to  claim 1 , wherein said sealing means is an O-ring. 
     
     
       5. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to  claim 1 , wherein said ventilated platen having a plurality of vent holes therethrough in fluid communication with said at least one aperture in said bottom wall of the tool body. 
     
     
       6. An apparatus for adhering a flexible film to a ventilated platen without air entrapment according to  claim 1 , wherein said tool lid further comprises a handle means on an outer surface to facilitate said transfer of the flexible film from said tool lid to said ventilated platen.