Magnetoresistance effect element and method for producing same

Abstract

There is provided a magnetoresistance effect element which is capable of causing a large sense current to flow between electrodes and which has a smaller dispersion in direction of magnetization of a CPP element based on a magnetic field due to the sense current and has a lager reproducing output, and a method for producing the same. The magnetoresistance effect element is produced by: after forming a first electrode, forming a magnetoresistance effect film on the first electrode; applying a self-condensing organic resist on the magnetoresistance effect film, and thereafter, causing the organic resist to be droplets; subsequently, forming an insulating film thereon, and thereafter, removing the organic resist to form a groove portion in the insulating film to expose the top surface of the magnetoresistance effect film; and filling the groove portion with an electrode material to form a second electrode.

1. A method for producing a magnetoresistance effect element comprising:
 forming a first electrode;  
 forming a magnetoresistance effect film on said first electrode;  
 applying a self-condensing organic resist on said magnetoresistance effect film, and thereafter, causing said organic resist to be droplets;  
 subsequently, forming an insulating film thereon, and thereafter, removing said organic resist to form a groove portion in said insulating film to expose the top surface of said magnetoresistance effect film; and  
 filling said groove portion with an electrode material to form a second electrode.  
 
   
   
     2. A method for producing a magnetoresistance effect element as set forth in  claim 1 , wherein the step of forming said first electrode is carried out by forming a magnetic yoke having a cross section having a tapered recessed portion and by filling said recessed portion of said magnetic yoke with an electrode material. 
   
   
     3. A method for producing a magnetoresistance effect element as set forth in  claim 1 , wherein a treatment for causing the surface of said magnetoresistance effect film to be hydrophilic is carried out before applying said organic resist. 
   
   
     4. A method for producing a magnetoresistance effect element as set forth in  claim 1 , wherein after forming said magnetoresistance effect film and before applying said organic resist, a magnetization fixing film overlapping only edge portions of said magnetoresistance effect film is formed, and a treatment for causing only an exposed surface of said magnetoresistance effect film to be hydrophilic is carried out.