System that includes an electrode configuration in a MEMS switch

Abstract

A microelectromechanical system (MEMS) switch that includes a signal contact, an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode. The signal contact includes a first portion and a second portion. The actuation electrode is positioned between the first and second portions of the signal contact.

1. A cell phone comprising:
 a bus; 
 a communications circuit coupled to the bus; and 
 a MEMS switch coupled to the bus, the MEMS switch including a signal contact that has an input contact, an output contact and two segments which electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode being positioned between the two segments of the signal contact. 
 
   
   
     2. The cell phone of  claim 1 , wherein the beam is a bridge beam. 
   
   
     3. The cell phone of  claim 1 , wherein the beam includes a plurality of protuberances that engage the signal contact. 
   
   
     4. A computer system comprising:
 a bus; 
 a controller coupled to the bus, the controller including a microphone; and 
 a MEMS switch coupled to the bus, the MEMS switch including a signal contact that has an input contact, an output contact and two segments which electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode being positioned between the two segments of the signal contact. 
 
   
   
     5. The computer system of  claim 4 , wherein the input contact is electrically connected to the output contact by a plurality of segments, and the actuation electrode includes a plurality of electrically coupled pads such that each pad is positioned between a unique pair of segments on the signal contact. 
   
   
     6. The computer system of  claim 4 , wherein the actuation electrode includes an inner pad that is positioned under the beam and between the two segments of the signal contact, and at least one outer pad that is positioned under the beam outside the two segments of the signal contact. 
   
   
     7. The computer system of  claim 6 , wherein the inner pad is electrically coupled to each outer pad. 
   
   
     8. The computer system of  claim 7 , wherein the MEMS switch includes a substrate such that the signal contact is on a surface of the substrate. 
   
   
     9. The computer system of  claim 8 , wherein the inner pad and the at least one outer pad are electrically coupled by a connecting pad positioned below the surface of the substrate. 
   
   
     10. A cell phone comprising:
 a bus; 
 a communications circuit coupled to the bus; and 
 a MEMS switch coupled to the bus, the MEMS switch including a substrate that has a surface and a signal contact on the surface of the substrate, the signal contact including an input contact, an output contact and two segments that electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode includes an inner pad that is positioned under the beam between the two segments of the signal contact and at least one outer pad that is positioned under the beam outside the two segments of the signal contact. 
 
   
   
     11. The cell phone of  claim 10 , wherein the inner pad is electrically coupled to each outer pad. 
   
   
     12. The cell phone of  claim 10 , wherein the inner pad and the at least one outer pad are electrically coupled by a connecting pad positioned below the surface of the substrate. 
   
   
     13. A computer system comprising:
 a bus; 
 a controller coupled to the bus, the controller including a microphone; and 
 a MEMS switch coupled to the bus, the MEMS switch including a substrate that has a surface and a signal contact on the surface of the substrate, the signal contact including an input contact, an output contact and two segments that electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode includes an inner pad that is positioned under the beam between the two segments of the signal contact and at least one outer pad that is positioned under the beam outside the two segments of the signal contact. 
 
   
   
     14. The computer system of  claim 13 , wherein the inner pad is electrically coupled to each outer pad. 
   
   
     15. The computer system of  claim 13 , wherein the inner pad and the at least one outer pad are electrically coupled by a connecting pad positioned below the surface of the substrate. 
   
   
     16. A cell phone comprising:
 a bus; 
 a communications circuit coupled to the bus; and 
 a MEMS switch coupled to the bus, the MEMS switch including a substrate that has a surface and a signal contact on the surface of the substrate, the signal contact including an input contact, an output contact and two segments that electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode including an inner pad that is positioned under the beam between the two segments of the signal contact and at least one outer pad that is positioned under the beam outside the two segments of the signal contact, the inner pad being electrically coupled to the at least one outer pad by a connecting pad positioned below the surface of the substrate. 
 
   
   
     17. The cell phone of  claim 16 , wherein the input contact is electrically connected to the output contact by a plurality of segments, and the actuation electrode includes a plurality of electrically connected pads such that each pad is positioned between a unique pair of segments on the signal contact. 
   
   
     18. The cell phone of  claim 16 , wherein the inner pad and the at least one outer pad are electrically coupled to the connecting pad by vias. 
   
   
     19. The cell phone of  claim 16 , wherein the beam is a bridge beam that includes a plurality of protuberances which engage the signal contact. 
   
   
     20. A computer system comprising:
 a bus; 
 a controller coupled to the bus, the controller including a microphone; and 
 a MEMS switch coupled to the bus, the MEMS switch including a substrate that has a surface and a signal contact on the surface of the substrate, the signal contact including an input contact, an output contact and two segments that electrically connect the input contact to the output contact, the MEMS switch further including an actuation electrode and a beam that engages the signal contact when a voltage is applied to the actuation electrode, the actuation electrode including an inner pad that is positioned under the beam between the two segments of the signal contact and at least one outer pad that is positioned under the beam outside the two segments of the signal contact, the inner pad being electrically coupled to the at least one outer pad by a connecting pad positioned below the surface of the substrate. 
 
   
   
     21. The computer system of  claim 20 , wherein the input contact is electrically connected to the output contact by a plurality of segments, and the actuation electrode includes a plurality of electrically connected pads such that each pad is positioned between a unique pair of segments on the signal contact. 
   
   
     22. The computer system of  claim 20 , wherein the inner pad and the at least one outer pad are electrically coupled to the connecting pad by vias. 
   
   
     23. The computer system of  claim 20 , wherein the beam is a bridge beam that includes a plurality of protuberances which engage the signal contact.