Static dissipation treatments for optical package windows

Abstract

An optically transparent conductive material is used for static dissipation of a cover material for an optical switching device. The optically transparent conductive material is deposited directly or indirectly on the cover material. The optically transparent conductive material forms an electrically continuous film. The optically transparent conductive material can also be used for anti-reflection.

1. An apparatus comprising:
 a substrate having a micromachined optical device disposed thereon; 
 a cover coupled to the substrate so as to cover the optical device; and 
 an optically transparent conductive coating disposed directly or indirectly on the cover for static dissipation, the optically transparent conductive coating comprising an ionomer that is at least partially ionized by an ionic liquid, wherein an electrical connection is made to the optically transparent conductive coating for static dissipation. 
 
     
     
       2. The apparatus of  claim 1 , wherein the ionomer comprises a sulfonic acid based ionomer. 
     
     
       3. The apparatus of  claim 2 , wherein the sulfonic acid based ionomer comprises perfluorosulfonic acid copolymerized with tetrafluoroethylene. 
     
     
       4. The apparatus of  claim 1 , wherein the ionomer comprises a carboxylic acid based ionomer. 
     
     
       5. The apparatus of  claim 4 , wherein the carboxylic acid based ionomer comprises methacrylic acid copolymerized with ethylene. 
     
     
       6. The apparatus of  claim 1 , wherein the cover comprises a metallized film for bonding to a metal frame, and wherein the optically transparent conductive coating contacts at least a portion of the metallized film. 
     
     
       7. The apparatus of  claim 6 , further comprising the metal frame bonded to the metallized film. 
     
     
       8. The apparatus of  claim 1 , wherein the optically transparent conductive coating is deposited on the cover in a manner sufficient to provide anti-reflection in addition to static dissipation. 
     
     
       9. The apparatus of  claim 8 , wherein the optically transparent conductive coating for anti-reflection and static dissipation is deposited to a thickness substantially equal to an odd multiple of one fourth of a predetermined optical wavelength in the film. 
     
     
       10. The apparatus of  claim 1 , further comprising:
 the substrate having a cavity formed therein; and 
 the optical device bonded to the substrate within the cavity, wherein the cover material with optically transparent conductive coating is bonded to the substrate across the cavity. 
 
     
     
       11. The apparatus of  claim 1 , wherein the optically transparent conductive coating is at least partially organic. 
     
     
       12. The apparatus of  claim 1 , wherein the optical device comprises integrated electronic circuitry. 
     
     
       13. The apparatus of  claim 1 , wherein the optically transparent conductive coating is disposed on an inside surface of the cover.