Device for stabilizing a workpiece during processing

Abstract

A device that stabilizes a workpiece during processing includes a first workpiece carrier part, a second work piece carrier part, and a fixing unit that mutually fixes the workpiece carrier parts in such a way that the workpiece is held between the first and-second workpiece carrier parts. The first workpiece carrier part has a patterned mask. In this way, the production costs can be significantly reduced particularly in the case of workpieces at risk of fracture.

1. A device that stabilizes a workpiece during processing comprising:
 a first workpiece carrier part; 
 a second workpiece carrier part; and 
 a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, wherein the patterned mask comprises a thickness of about 10 to 250 μm. 
 
   
   
     2. The device as claimed in  claim 1  wherein the second workpiece carrier part comprises a covering plate and the first workpiece carrier part comprises a carrier plate with a mask formed in an integrated fashion. 
   
   
     3. The device as claimed in  claim 1  wherein the second workpiece carrier part comprises a carrier plate with a first depression that receives the workpiece. 
   
   
     4. The device as claimed in  claim 1  wherein the patterned mask comprises a stencil mask film usable for an implantation. 
   
   
     5. The device as claimed in  claim 1  wherein the workpiece is held only at opposite main surfaces. 
   
   
     6. The device as claimed in  claim 1  wherein the fixing unit comprises an articulation. 
   
   
     7. The device as claimed in  claim 1  wherein the fixing unit comprises at least one mechanical locking element. 
   
   
     8. The device as claimed in  claim 1  wherein the fixing unit comprises at least one magnet element. 
   
   
     9. The device as claimed in  claim 3  wherein the first workpiece carrier part comprises a supporting element that carries the patterned mask and the second workpiece carrier part comprises a second depression that receives the supporting element. 
   
   
     10. The device as claimed in  claim 1  wherein openings in the mask are formed in at least one of a punctiform fashion, in a slotted fashion, in a linear fashion, in a rectangular fashion, or in a round fashion with regard to a plan view. 
   
   
     11. The device as claimed in  claim 10  wherein the openings comprise at least one of a rectangle or a truncated cone in cross-section. 
   
   
     12. The device as claimed in  claim 1  wherein the patterned mask comprises a metallic material, a ceramic, or a plastic. 
   
   
     13. The device as claimed in  claim 1  wherein the workpiece comprises a thin wafer carried on a carrier wafer. 
   
   
     14. The device as claimed in  claim 13  wherein the thin wafer has a thickness of about 140 μm. 
   
   
     15. An apparatus for stabilizing a workpiece during processing comprising:
 a first workpiece carrier part; 
 a second workpiece carrier part; and 
 means for mutually fixing the workpiece carrier pads in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask. 
 
   
   
     16. The apparatus as claimed in  claim 15  wherein the second workpiece carrier part comprises a covering plate and the first workpiece carrier part comprises a carrier plate with an integral mask. 
   
   
     17. The apparatus as claimed in  claim 15  wherein the second workpiece carrier part comprises a carrier plate with a first depression configured to receive the workpiece. 
   
   
     18. The apparatus as claimed in  claim 17  wherein the first workpiece carrier part comprises a supporting means for carrying the patterned mask and wherein the second workpiece carrier part comprises a second depression configured to receive the supporting element. 
   
   
     19. A device that stabilizes a workpiece during processing comprising;
 a first workpiece carrier part; 
 a second workpiece carrier part; and 
 a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, and wherein the fixing unit comprises an articulation. 
 
   
   
     20. The device as claimed in  claim 19  wherein the fixing unit comprises at least one mechanical locking element. 
   
   
     21. A device that stabilizes a workpiece during processing comprising:
 a first workpiece carrier part; 
 a second workpiece carrier part; and 
 a fixing unit configurable to mutually fix the workpiece carrier parts in such a way that the workpiece is held between the first and second workpiece carrier parts, wherein the first workpiece carrier part comprises a patterned mask, wherein the patterned mask comprises a metallic material, a ceramic, or a plastic.