Carbon nanotubes and method of manufacturing same, electron emission source, and display

Abstract

The present invention provides carbon nanotubes perpendicularly and densely deposited over a wide area of a substrate. The carbon nanotubes are manufactured by supplying alternating-current power at a specific frequency between an anode and a cathode disposed in a reactor, and causing plasma to be generated between the anode and the cathode by introducing mixed gas containing an aliphatic hydrocarbon having 1-5 carbon atoms and hydrogen or mixed gas containing an aromatic hydrocarbon and hydrogen. The substrate is disposed between the anode and the cathode and held at a distance two times or less of the mean free path of a hydrocarbon cation from the anode.

1. A method of manufacturing carbon nanotubes comprising supplying alternating-current power at a specific frequency between an anode and a cathode disposed in a reactor, and causing plasma to be generated between the anode and the cathode by introducing mixed gas containing an aliphatic hydrocarbon having 1-5 carbon atoms and hydrogen or mixed gas containing an aromatic hydrocarbon and hydrogen, so as to deposit carbon nanotubes on a substrate disposed between the anode and the cathode and held at a distance two times or less of the mean free path of a hydrocarbon cation from the anode,
 wherein a magnetic field is applied by disposing a magnet so that magnetic force occurs in a direction perpendicular to the substrate. 
 
     
     
       2. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the distance between the anode and the substrate is 20 cm or less. 
     
     
       3. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the distance between the anode and the substrate is 10 cm or less. 
     
     
       4. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the specific frequency is 13.56 MHz. 
     
     
       5. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the aliphatic hydrocarbon having 1-5 carbon atoms is a saturated aliphatic hydrocarbon having 1-5 carbon atoms. 
     
     
       6. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the aromatic hydrocarbon is benzene, toluene, or xylene. 
     
     
       7. The method of manufacturing carbon nanotubes according to  claim 1 , wherein a metal, an alloy, a metal complex, or a metal compound is caused to adhere to the substrate as a catalyst. 
     
     
       8. The method of manufacturing carbon nanotubes according to  claim 7 , wherein the catalyst comprises at least one member selected from the group consisting of iron, cobalt, nickel, tungsten, platinum, rhodium, and palladium. 
     
     
       9. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the pressure of the mixed gas is 1 to 50 Pa. 
     
     
       10. The method of manufacturing carbon nanotubes according to  claim 1 , wherein the aliphatic hydrocarbon having 1-5 carbon atoms is an unsaturated aliphatic hydrocarbon having 1-5 carbon atoms.