Fabrication process and package design for use in a micro-machined seismometer or other device

Abstract

An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states. The capacitive plate is made of insulating material. A new method of soldering the capacitive plate to the suspension plate is also disclosed.

1. A seismometer comprising:
 at least one fixed capacitive plate; 
 a first capacitive sensor array positioned on a surface of said fixed capacitive plate, said first capacitive sensor array having a periodic pattern of conductive elements; 
 a suspension plate having a proof mass supported by a plurality of flexural elements capable of substantially constraining motion of said proof mass to a single axis with at least one intermediate frame positioned within and between said flexural elements, said flexural elements being predeflected when lying flat, whereby said proof mass is centered on said suspension plate when said suspension plate is at a “Galperin” orientation to a vertical axis; 
 a second capacitive sensor array positioned on a surface of said proof mass having a periodic pattern of conductive elements aligned in a common direction of periodicity parallel to said conductive elements in said first capacitive sensor array in separated opposition; 
 an electrical connection to said second capacitive sensor array on said proof mass allowing a coupling of cyclic excitations from external components through said periodic pattern of said second capacitive sensor array to said periodic pattern of said first capacitive sensor array, said coupling ranging between zero and one hundred percent and being a cycling positional measure of said proof mass with respect to said fixed plate; and 
 an electrical connection to said first capacitive sensor array transmitting a signal resulting from said coupling of said first capacitive sensor array to said second capacitive sensor array to external electronics, said external electronics determining the percentage of said coupling between the first capacitive sensor array and the second capacitive sensor array in order to transduce the position of said proof mass relative to said fixed plate. 
 
     
     
       2. The seismometer of  claim 1 , wherein said capacitive plate is comprised of insulating material. 
     
     
       3. The seismometer of  claim 1 , further comprising a sandwich of a fixed capacitive plate, a proof mass plate and a capping plate, wherein the thickness and material of said fixed capacitive plate and said capping plate are substantially identical. 
     
     
       4. The seismometer of  claim 2 , wherein said insulating material is glass. 
     
     
       5. The seismometer of  claim 2 , further comprising a differential displacement transducer pickup capacitor. 
     
     
       6. The seismometer of Claim  3 , further comprising an additional capping plate on the back of said proof mass plate, said capping plate forming a protective enclosure around said periodic pattern of conductive elements on the surface of said proof mass plate, such that said fixed capacitive plate is on one side of said proof mass plate and said capping plate is on the other side of said proof mass plate. 
     
     
       7. The seismometer of  claim 6 , wherein said capping plate comprises at least one cavity, said cavity being formed by micro-abrasion with a protective mask. 
     
     
       8. The seismometer of  claim 6 , wherein said fixed capacitive plate comprises at least one channel for relieving a surface of said fixed capacitive plate unused for said first capacitive sensor array, said channel being formed by micro-abrasion with a protective mask. 
     
     
       9. The seismometer of  claim 4 , further comprising a high resistivity film positioned over said glass material to prevent static charge build up. 
     
     
       10. The seismometer of  claim 3  fabricated in a batch fabrication as a wafer sandwich, whereby individual die are capable of being separated from said sandwich using controlled fracture of weakened supports formed by micro-abrasion in said fixed capacitive plate and said capping plate and thin supports formed by DRIE in said proof mass plate. 
     
     
       11. The seismometer of  claim 1 , wherein said capacitive plate is attached to said suspension plate by a plurality of solder balls of essentially the same diameter. 
     
     
       12. The seismometer of  claim 1 , further comprising an elastomeric connector having a plurality of wires, said plurality of wires contacting with a plurality of connection pads on said capacitive plate and with a plurality of connection points on said external electronics. 
     
     
       13. The seismometer of  claim 12 , wherein said wires are gold plated. 
     
     
       14. The seismometer of  claim 12 , wherein said elastomeric connector is positioned in a slot formed in said suspension plate. 
     
     
       15. The seismometer of  claim 1 , further comprising an additional electronic circuit, said electronic circuit being capable of compensating for variations in the heating power of said external electronics by injecting additional heating power into said external electronics. 
     
     
       16. The seismometer of  claim 15 , wherein said additional electronic circuit comprises a high frequency amplitude modulated alternating current (AC) carrier to maintain constant heating in said external electronics as the low frequency seismic signal varies. 
     
     
       17. The seismometer of  claim 16 , further comprising a digital control loop, said control loop being capable of compensating for external temperature variations maintaining the temperature of said seismometer. 
     
     
       18. The seismometer of  claim 1 , further comprising a plurality of interconnecting beams etched into said suspension plate, said plurality of interconnecting beams providing thermal isolation for said suspension plate. 
     
     
       19. The seismometer of  claim 1 , wherein said suspension plate is thermally isolated through vacuum sealing.