Heat treatment jig and heat treatment method for silicon wafer

Abstract

In this heat treatment jig and method for silicon wafers, a silicon wafer is heat-treated while being mounted on support projections provided on three support arms, having an intervening spacing, protruding from a support frame towards the center. At that time, all the support projections under the silicon wafer are positioned on a same circle within a region where a radial distance from the center is defined by 85 to 99.5% of the wafer radius, and the support arms form an angle of 120° with each other about the center. With this jig and method, free depth of a dislocation generated from a pin position can be controlled deeper than a device formation region, and a widest slip-free region where the surface is free from slip dislocation is obtained.

1. A heat treatment method for heat treating a silicon wafer in a treatment furnace, comprising:
 supporting a silicon wafer by three support positions within a region, in an outer radial direction ranging from more than 95% to 99.5% of a radius of the silicon wafer, 
 wherein the silicon wafer is heat treated by a rapid thermal annealer (RTA) treatment. 
 
     
     
       2. A heat treatment method for heat treating a silicon wafer, utilizing a three points supporting device comprising:
 three support arms protruding from a support frame towards a center so as to form an intervening spacing with each other; and 
 support projections projecting upwards from each support arm, on which a silicon wafer is mounted and heat-treated in a heat treatment furnace, 
 wherein, when all the support projections are positioned on a same circle, all the support projections are positioned within a region, in an outer radial direction ranging from more than 95% to 99.5% of the wafer radius, and the support arms are arranged so as to form an angle of 120° with each other about the center point, 
 wherein the silicon wafer is heat treated by a rapid thermal annealer (RTA) treatment. 
 
     
     
       3. The heat treatment method for heat treating a silicon wafer according to  claim 1 , wherein the support projections are positioned within a region, in an outer radial direction, ranging from 97 to 99.5% of the wafer radius. 
     
     
       4. The heat treatment method for heat treating a silicon wafer according to  claim 2 , wherein the support projections are positioned within a region, in an outer radial direction, ranging from 97 to 99.5% of the wafer radius.