Methods of manufacturing semiconductor devices including a doped silicon layer

Abstract

Methods for manufacturing a semiconductor device include forming a seed layer containing a silicon material on a substrate. An amorphous silicon layer containing amorphous silicon material is formed on the seed layer. The amorphous silicon layer is doped with an impurity. A laser beam is irradiated onto the amorphous silicon layer to produce a phase change of the amorphous silicon layer and change the amorphous silicon layer into a single-crystal silicon layer based on the seed layer.

1. A method for manufacturing a semiconductor device, comprising:
 forming a seed layer containing a silicon material on a substrate; 
 forming an amorphous silicon layer containing amorphous silicon material on the seed layer; 
 doping the amorphous silicon layer with an impurity; and 
 irradiating a laser beam onto the doped amorphous silicon layer to produce a phase change of the amorphous silicon layer and change the amorphous silicon layer into a single-crystal silicon layer based on the seed layer. 
 
     
     
       2. The method of  claim 1 , wherein:
 forming the seed layer comprises forming the seed layer through a selective epitaxial growth process; and 
 doping the amorphous silicon layer with an impurity comprises doping the amorphous silicon layer through an ion implantation on an upper face of the amorphous silicon layer. 
 
     
     
       3. The method of  claim 1 , wherein doping the amorphous silicon layer with an impurity comprises doping the amorphous silicon layer with an impurity that increases a rate of heat transfer through the amorphous silicon layer. 
     
     
       4. The method of  claim 1 , wherein the seed layer has a different absorption coefficient than the amorphous silicon layer and wherein irradiating the laser beam onto the doped amorphous silicon layer includes heating the doped amorphous silicon layer to a temperature exceeding a melting point temperature of the doped amorphous silicon layer while a temperature of the seed layer is substantially unchanged as a result of the different absorption coefficient of the seed layer. 
     
     
       5. The method of  claim 2 , wherein the selective epitaxial growth process comprises vapor phase epitaxy. 
     
     
       6. The method of  claim 2 , wherein forming the seed layer comprises forming the seed layer of a single single-crystal silicon material and wherein doping the amorphous silicon layer comprises doping the amorphous silicon layer with Ge. 
     
     
       7. The method of  claim 2 , wherein the amorphous silicon layer comprises a polysilicon. 
     
     
       8. The method of  claim 2 , wherein irradiating a laser beam onto the doped amorphous silicon layer includes heating the substrate including the seed layer and the doped amorphous silicon layer to a temperature of about 350° C. to about 450° C. while irradiating the laser beam onto the doped amorphous silicon layer. 
     
     
       9. The method of  claim 2 , wherein doping the amorphous silicon layer comprises doping the amorphous silicon layer with Ge, As and/or P. 
     
     
       10. A method for manufacturing a semiconductor device, the method comprising:
 providing a single-crystal silicon substrate; 
 forming an insulation layer on the single-crystal silicon substrate, the insulation layer including a contact hole exposing a surface of the single-crystal silicon substrate; 
 forming a seed contact containing a silicon material in the contact hole; 
 forming an amorphous silicon layer containing an amorphous silicon material on an upper face of the insulation layer including the seed contact; 
 doping the amorphous silicon layer with an impurity; and 
 irradiating a laser beam onto the doped amorphous silicon layer to provide a phase change of the amorphous silicon layer and change the amorphous silicon layer into a single-crystal silicon layer based on the seed contact. 
 
     
     
       11. The method of  claim 10 , wherein:
 forming the seed contact comprises forming the seed contact through a selective epitaxial growth process; and 
 doping the amorphous silicon layer with an impurity comprises doping the amorphous silicon layer through an ion implantation on an upper face of the amorphous silicon layer. 
 
     
     
       12. The method of  claim 11 , wherein:
 the selective epitaxial growth process comprises vapor phase epitaxy, 
 doping the amorphous silicon layer comprises doping the amorphous silicon layer with Ge; 
 the amorphous silicon layer comprises a polysilicon; and 
 irradiating a laser beam onto the doped amorphous silicon layer includes heating the substrate including the seed layer and the doped amorphous silicon layer to a temperature of about 350° C. to about 450° C. while irradiating the laser beam onto the doped amorphous silicon layer. 
 
     
     
       13. The method of  claim 11 , wherein forming the insulation layer is preceded by forming an electrical device on the single-crystal silicon substrate. 
     
     
       14. The method of  claim 13 , wherein the insulation layer comprises a first insulation layer, the seed contact comprises a first seed contact, the amorphous silicon layer comprises a first amorphous silicon layer and the single-crystal silicon layer comprises a first single-crystal silicon layer and wherein the method further comprises:
 forming an upper electrical device on the first single-crystal silicon layer; 
 
       forming a second insulation layer on the first single-crystal silicon layer including the upper electrical device;
 forming a contact hole in the second insulation layer that exposes an upper surface of the first single-crystal silicon layer; 
 forming a second seed contact containing a silicon material in the contact hole in the second insulation layer through a selective epitaxial growth process; 
 forming a second amorphous silicon layer containing an amorphous silicon material on an upper face of the second insulation layer including the second seed contact; 
 doping the second amorphous silicon layer with an impurity through an ion implantation of doping impurity on an upper face of the second amorphous silicon layer; and 
 irradiating a laser beam onto the doped second amorphous silicon layer to provide a phase change of the second amorphous silicon layer and change the second amorphous silicon layer into a second single-crystal silicon layer. 
 
     
     
       15. The method of  claim 14 , wherein the selective epitaxial growth process comprises vapor phase epitaxy. 
     
     
       16. The method of  claim 14 , wherein forming the second seed layer comprises forming the second seed layer of a single single-crystal silicon material and wherein doping the second amorphous silicon layer comprises doping the second amorphous silicon layer with Ge. 
     
     
       17. The method of  claim 14 , wherein the second amorphous silicon layer comprises a polysilicon. 
     
     
       18. The method of  claim 14 , wherein irradiating a laser beam onto the doped second amorphous silicon layer includes heating the substrate including the second seed layer and the second doped amorphous silicon layer to a temperature of about 350° C. to about 450° C. while irradiating the laser beam onto the second doped amorphous silicon layer. 
     
     
       19. The method of  claim 18 , wherein irradiating a laser beam onto the doped second amorphous silicon layer includes heating the substrate including the second seed layer and the second doped amorphous silicon layer to a temperature of about 400° C. while irradiating the laser beam onto the second doped amorphous silicon layer. 
     
     
       20. The method of  claim 14 , wherein irradiating a laser beam comprises scanning the second doped amorphous silicon layer horizontally. 
     
     
       21. The method of  claim 14 , wherein doping the second amorphous silicon layer comprises doping the second amorphous silicon layer with Ge, As and/or P.