Pattern management method and pattern management program

Abstract

A pattern management method includes extracting patterns having process margins equal to or below a predetermined value from a chip layout of an integrated circuit, screening a plurality of types of representative patterns from the extracted pattern, extracting patterns closest to the most outer periphery of the chip from the representative patterns, and representatively managing the extracted patterns which is closest to the most outer periphery of the chip.

1. A pattern management method comprising:
 extracting patterns having process margins equal to or below a predetermined value from a chip layout of an integrated circuit by using a computer; 
 screening a plurality of types of representative patterns from the extracted pattern to identify critical patterns through the computer; 
 extracting the critical patterns closest to the most outer periphery of the chip from the representative patterns through the computer, wherein the critical patterns have process margins equal to or below the predetermined value; and 
 representatively managing the extracted critical patterns which are closest to the most outer periphery of the chip including performing measurement of dimensions on a mask and a wafer at positions corresponding to the extracted critical patterns closest to the most outer periphery of the chip. 
 
     
     
       2. The method according to  claim 1 , wherein said screening a plurality of types of representative patterns includes screening similar patterns including reverse and mirror patterns as the same pattern with respect to size and shape from the plurality of types of representative patterns. 
     
     
       3. The method according to  claim 1 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to four corner portions of the chip. 
     
     
       4. The method according to  claim 1 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to centers of four sides of the chip. 
     
     
       5. The method according to  claim 1 , further comprising extracting a pattern at a central portion of the chip as one of the extracted critical patterns for managing. 
     
     
       6. The method according to  claim 1 , wherein said managing the extracted critical patterns closest to the most outer periphery of the chip includes performing process simulation and condition correction at the positions corresponding to the extracted critical patterns closest to the most outer periphery of the chip. 
     
     
       7. A pattern management method comprising:
 extracting patterns each having one or more side peaks in light condensing during exposure from a chip layout of an integrated circuit by using a computer; 
 screening a plurality of representative patterns from the extracted patterns to identify critical patterns through the computer; 
 extracting the critical patterns closest to the most outer periphery of the chip from the extracted patterns having one or more side peaks through the computer, wherein the critical patterns have one or more side peaks in light condensing during exposure; and 
 managing the extracted critical patterns which are closest to the most outer periphery of the chip including performing measurement of dimensions on a mask and a wafer at positions corresponding to the extracted patterns closest to the most outer periphery of the chip. 
 
     
     
       8. The method according to  claim 7 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to four corner portions of the chip. 
     
     
       9. The method according to  claim 7 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to centers of four sides of the chip. 
     
     
       10. The method according to  claim 7 , further comprising extracting a pattern at a central portion of the chip as one of the extracted critical patterns for managing. 
     
     
       11. The method according to  claim 7 , wherein said managing the extracted critical patterns closest to the most outer periphery of the chip includes performing simulation and correction at the positions corresponding to the extracted critical patterns closest to the most outer periphery of the chip. 
     
     
       12. A computer program product configured to store pattern management program instructions for execution on a computer system enabling the computer system to perform:
 extracting patterns having process margins equal to or below a predetermined value from a chip layout of an integrated circuit; 
 when the patterns having process margins equal to or below the predetermined value are extracted, screening a plurality of types of representative patterns from the extracted patterns to identify critical patterns; 
 extracting the critical patterns closest to the most outer periphery of the chip from the representative patterns, wherein the critical patterns have process margins equal to or below the predetermined value; and 
 representatively managing the extracted critical patterns which are closest to the most outer periphery of the chip including performing measurement of dimensions on a mask and a wafer at positions corresponding to the extracted critical patterns closest to the most outer periphery of the chip. 
 
     
     
       13. The computer program product according to  claim 12 , wherein said screening a plurality of types of representative patterns includes screening similar patterns including reverse and mirror patterns as the same pattern with respect to size and shape from the plurality of types of representative patterns. 
     
     
       14. The computer program product according to  claim 12 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to four corner portions of the chip. 
     
     
       15. The computer program product according to  claim 12 , wherein said extracting the critical patterns closest to the most outer periphery of the chip includes extracting respective patterns closest to centers of four sides of the chip. 
     
     
       16. The computer program product according to  claim 12 , further comprising extracting a pattern at a central portion of the chip as one of the extracted critical patterns for managing.