Contact apparatus and semiconductor test equipment using the same

Abstract

A contact apparatus includes a pusher having first and second surfaces, the first surface being connected to a pressure unit, stoppers protruding from edges of the second surface of the pusher away from the pressure unit, a pusher block having first and second surfaces facing each other, the first surface facing the pusher, and the second surface being connected to a semiconductor device, coupling members connecting the pusher to the pusher block, and a connector disposed between the pusher and the pusher block, at least part of a surface of the connector being circular, and the circular surface making a point contact with the pusher or the pusher block.

What is claimed is: 
     
       1. A contact apparatus, comprising:
 a pusher having first and second surfaces, the first surface being connected to a pressure unit; 
 stoppers protruding from edges of the second surface of the pusher away from the pressure unit; 
 a pusher block having first and second surfaces facing each other, the first surface facing the pusher, and the second surface being connected to a semiconductor device; 
 coupling members connecting the pusher to the pusher block; and 
 a connector disposed between the pusher and the pusher block, at least part of a surface of the connector being curved, 
 wherein the curved surface of the connector faces at least one of the pusher and pusher block, the curved surface of the connector making a movable point contact with the at least one of the pusher and the pusher block it faces, and 
 wherein the coupling members are elastic and extend from the second surface of the pusher to the first surface of the pusher block, the coupling members directly contacting the first surface of the pusher block. 
 
     
     
       2. The apparatus as claimed in  claim 1 , wherein:
 a first end of each of the coupling members is coupled to the pusher within an area defined between an imaginary circumference of all the stoppers and an outer circumference of the connector, the imaginary circumference of all the stoppers being defined by an imaginary line sequentially connecting all the stoppers, and 
 a second end of each of the coupling members is coupled to the pusher block at a position outside the circumference of the connector. 
 
     
     
       3. The apparatus as claimed in  claim 1 , further comprising at least one holder protruding from the first surface of the pusher block toward the second surface of the pusher, the at least one holder contacting and surrounding the connector. 
     
     
       4. The apparatus as claimed in  claim 1 , wherein the pusher includes a pusher body having a trench, a pusher plate covering the trench, and an elastic member placed in the trench and connecting the pusher body and the pusher plate. 
     
     
       5. The apparatus as claimed in  claim 1 , wherein the connector makes a direct point of contact with each of the pusher and the pusher block. 
     
     
       6. The apparatus as claimed in  claim 1 , wherein the connector is a sphere that is movable relative to the pusher block. 
     
     
       7. The apparatus as claimed in  claim 1 , wherein the curved surface is a spherical surface. 
     
     
       8. The apparatus as claimed in  claim 1 , wherein at least part of a top surface of the pusher block is completely flat and is facing the pusher, the connector being a movable sphere in direct contact with the completely flat top surface of the pusher block. 
     
     
       9. The apparatus as claimed in  claim 1 , wherein the curved surface of the connector is in direct contact with the at least one of the pusher and the pusher block it faces. 
     
     
       10. The apparatus as claimed in  claim 9 , wherein the curved surface of the connector is non-stationary relative to the at least one of the pusher and the pusher block it faces. 
     
     
       11. Semiconductor test equipment, comprising:
 at least one socket, the socket including a plurality of socket pins corresponding to external terminals of a semiconductor device to be tested; 
 socket guides fixing the socket in a stable position; 
 a system exchanging electrical signals with the socket; and 
 a match plate having a top surface connected to a pressure unit and a bottom surface opposite the top surface and connected to at least one contact apparatus, the contact apparatus corresponding to the socket and including:
 a pusher having first and second surfaces, the first surface being connected to a pressure unit, 
 stoppers protruding from edges of the second surface of the pusher away from the pressure unit, 
 a pusher block having first and second surfaces facing each other, the first surface facing the pusher, and the second surface being connected to a semiconductor device, 
 coupling members connecting the pusher to the pusher block, and 
 a connector disposed between the pusher and the pusher block, at least part of a surface of the connector being curved, 
 wherein the curved surface of the connector faces at least one of the pusher and pusher block, the curved surface of the connector making a movable point contact with the at least one of the pusher and the pusher block it faces, and 
 wherein the coupling members are elastic and extend from the second surface of the pusher to the first surface of the pusher block, the coupling members directly contacting the first surface of the pusher block. 
 
 
     
     
       12. The equipment as claimed in  claim 11 , wherein a plurality of sockets and a plurality of contact apparatuses are arranged in a (m, n) matrix of m sockets and m contact apparatuses in a first direction and n sockets and n contact apparatuses in a second direction, the plurality of contact apparatuses correspond to respective ones of the plurality of sockets. 
     
     
       13. The equipment as claimed in  claim 12 , wherein the (m, n) matrix is one of (4, 8), (8, 8), (8, 16), (16, 16), and (16, 32). 
     
     
       14. The equipment as claimed in  claim 11 , wherein the connector of the contact apparatus makes a point contact with the pusher block. 
     
     
       15. The equipment as claimed in  claim 11 , wherein the connector of the contact apparatus makes a point contact with the pusher. 
     
     
       16. The equipment as claimed in  claim 11 , wherein the connector of the contact apparatus makes a direct point of contact with each of the pusher and the pusher block, the direct point of contact being a single point of contact with each of the corresponding pusher and pusher block. 
     
     
       17. The equipment as claimed in  claim 16 , wherein the connector is a non-stationary sphere. 
     
     
       18. The equipment as claimed in  claim 11 , wherein the pusher includes a trench in the second surface, the connector and the pusher being connected to each other within the trench. 
     
     
       19. The equipment as claimed in  claim 11 , wherein:
 a first end of each of the coupling members is coupled to the pusher within an area defined between an imaginary line sequentially connecting all the stoppers and a circumference of the connector, and a second end of each of the coupling members is coupled to the pusher block at a position outside the circumference of the connector, and 
 the contact apparatus further comprises at least one holder protruding from the first surface of the pusher block toward the second surface of the pusher, the at least one holder surrounding the connector. 
 
     
     
       20. The equipment as claimed in  claim 11 , wherein the pusher includes a pusher body having a trench, a pusher plate covering the trench, and an elastic member placed in the trench and connecting the pusher body and the pusher plate.