Liquid supply system

Abstract

A space-saving liquid supply system includes increased cooling efficiency. A first pump chamber P 1 is formed by an outside of a bellows 130 in a second vessel 120 and the first pump chamber P 1 is provided with a first intake port 121 for taking the liquid in the first vessel 110 into the first pump chamber P 1 and a first delivery port 122 for delivering the taken-in liquid L from inside the first pump chamber P 1 into a supply passage K 1 . A second pump chamber P 2 is formed by a sealed space in the bellows 130 and the second pump chamber P 2 is provided with a second intake port 123 for taking the liquid L in the first vessel 110 into the second pump chamber P 2 and a second delivery port 124 for delivering the taken-in liquid from inside the second pump chamber P 2 into the supply passage K 1.

The invention claimed is: 
     
       1. A liquid supply system comprising:
 a first vessel in which ultracold liquid is housed; 
 a second vessel disposed within the liquid in the first vessel to take in the liquid from the first vessel and to deliver the liquid into a supply passage communicating with an outside of the liquid supply system; 
 a first bellows disposed to enter the second vessel; and 
 a shaft formed to be reciprocated by a driving source to cause the first bellows to expand and contract, 
 wherein an outside of the first bellows in the second vessel serves as a first pump chamber provided with a first intake port for taking the liquid in the first vessel into the first pump chamber and a first delivery port for delivering the liquid from inside the first pump chamber into the supply passage, and 
 an inside of the first bellows serves as a second pump chamber formed by a sealed space and provided with a second intake port for taking the liquid in the first vessel into the second pump chamber and a second delivery port for delivering the liquid from inside the second pump chamber into the supply passage. 
 
     
     
       2. The liquid supply system according to  claim 1 , wherein a further sealed space is formed through which the shaft extending from outside the first vessel to reach the first bellows is inserted, an inside of the further sealed space being filled with gas. 
     
     
       3. The liquid supply system according to  claim 1 , wherein a further sealed space is formed through which the shaft extending from outside the first vessel to reach the first bellows is inserted, an inside of the further sealed space being evacuated. 
     
     
       4. The liquid supply system according to  claim 1 , wherein a further sealed space is formed through which the shaft extending from outside the first vessel to reach the first bellows is inserted, a layer of the liquid and a layer of gas are formed in the further sealed space, and a branch passage branching off the supply passage is connected to the further sealed space to form a buffer structure for buffering pressure variation of the liquid supplied through the supply passage. 
     
     
       5. The liquid supply system according to  claim 4 , wherein the buffer structure is provided with a safety valve for allowing internal pressure to escape when the pressure in the further sealed space through which the shaft is inserted becomes equal to or higher than a predetermined pressure. 
     
     
       6. The liquid supply system according to  claim 1 , wherein a further sealed space is formed through which the shaft extending from outside the first vessel to reach the first bellows is inserted, the further sealed space and the second pump chamber are separated by a small second bellows, the further sealed space and an outside space are separated by a small third bellows, and both the small second bellows and the small third bellows expand and contract as the shaft reciprocates and have smaller outer diameters than the first bellows. 
     
     
       7. The liquid supply system according to  claim 6 , wherein a heater for adjusting a temperature is provided near the small third bellows separating the further sealed space and the outside space. 
     
     
       8. The liquid supply system according to  claim 1 , wherein a shaft member and a bearing of the shaft member are provided below the first bellows. 
     
     
       9. The liquid supply system according to  claim 1 , wherein a bottom side of the second vessel and the first bellows are connected by a small second bellows which communicates with an inside of the first vessel, expands and contracts as the shaft reciprocates, and has a smaller outer diameter than the first bellows.