Probe and probe card

Abstract

A probe is provided with a linear main body portion having a tip in contact with an electrode of a member to be tested in a state where a board-side end is in contact with the circuit board side of a probe card. An elastic support portion is provided on a board-side end portion of the main body portion and elastically supports the main body portion on the probe card side. The support portion has its base end side integrally fixed to the board-side end portion and is formed with the distal end side directed toward the tip portion of the main body portion and curved having an arc shape toward the main body portion side. Two pieces of the support portion are provided symmetrically on both sides sandwiching the board-side end portion and are configured by being curved, each having an arc shape with the same radius of curvature.

The invention claimed is: 
     
       1. A probe comprising:
 a linear main body portion extending through a probe head having a top plate and a bottom plate, the linear main body portion having a tip in contact with an electrode of a member to be tested and a board-side end in contact with a circuit board side of a probe card positioned above the top plate of the probe head; and 
 an elastic support portion which is provided on a board-side end portion of the main body portion and positioned between the circuit board side of the probe card and the top plate of the probe head, and which elastically supports the main body portion on a probe card side of the probe head, wherein the elastic support portion has a base end side integrally fixed to the board-side end portion of the main body portion and having a distal end side directed toward a tip portion of the main body portion, and 
 two pieces of the elastic support portion are provided symmetrically on two sides sandwiching the main body portion on the board-side end portion of the main body portion, each piece having an arc shape with a same radius of curvature and a distal end that curves toward the main body portion. 
 
     
     
       2. The probe according to  claim 1 , wherein
 the main body portion is a conductive material having elasticity. 
 
     
     
       3. The probe according to  claim 1 , wherein the main body portion is inserted through a probe hole of the top plate and a probe hole of the bottom plate and the tip of the main body portion is brought into contact with the electrode of the member to be tested in a state while the board-side end of the main body portion is in contact with an interposer on the circuit board side of the probe card. 
     
     
       4. The probe according to  claim 1 , wherein
 the elastic support portion is a conductive material having elasticity. 
 
     
     
       5. The probe according to  claim 1 , wherein
 the distal end side of each piece of the elastic support portion includes a free end disposed toward the tip portion of the main body portion. 
 
     
     
       6. The probe according to  claim 1 , wherein
 the elastic support portion is formed by being curved having an arc shape having the same radius of curvature over its entire length. 
 
     
     
       7. The probe according to  claim 1 , wherein
 each piece of the elastic support portion has a curvature on its base end side that is smaller than a curvature on the distal end side. 
 
     
     
       8. The probe according to  claim 1 , wherein the probe is one of a plurality of probes provided in a probe card.